Description

Book Synopsis
While single wave ellipsometry has been around for years, spectroscopic ellipsometry is fast becoming the method of choice for measuring the thickness and optical properties of thin films. This book provides the first practical introduction to spectroscopic ellipsometry and the related techniques of reflectometry. A guide for practitioners and researchers in a variety of disciplines, it addresses a broad range of applications in physics, chemistry, electrical engineering, and materials science.

Table of Contents
Perspective and History.

Fundamentals.

Optical Properties of Materials and Layered Structures.

Instrumentation.

The Anatomy of a Reflectance Spectrum.

Aspects of Single-Wavelength Ellipsometry.

The Anatomy of an Ellipsometric Spectrum.

Analytical Methods and Approach.

Optical Data Analysis.

Quality Assurance.

Very Thin Films.

Roughness.

Appendices.

Index.

Spectroscopic Ellipsometry and Reflectometry

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    A Hardback by Harland G. Tompkins, William A. McGahan

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      Book details

      Publisher John Wiley & Sons Inc
      Published 6 April 1999
      ISBN-13 9780471181729
      978-0471181729
      ISBN-10 0471181722
      Also in:
      Optical physics Materials science

      Description

      Book Synopsis
      While single wave ellipsometry has been around for years, spectroscopic ellipsometry is fast becoming the method of choice for measuring the thickness and optical properties of thin films. This book provides the first practical introduction to spectroscopic ellipsometry and the related techniques of reflectometry. A guide for practitioners and researchers in a variety of disciplines, it addresses a broad range of applications in physics, chemistry, electrical engineering, and materials science.

      Table of Contents
      Perspective and History.

      Fundamentals.

      Optical Properties of Materials and Layered Structures.

      Instrumentation.

      The Anatomy of a Reflectance Spectrum.

      Aspects of Single-Wavelength Ellipsometry.

      The Anatomy of an Ellipsometric Spectrum.

      Analytical Methods and Approach.

      Optical Data Analysis.

      Quality Assurance.

      Very Thin Films.

      Roughness.

      Appendices.

      Index.

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