Atomic Layer Deposition for Semiconductors

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Paperback / softback by Cheol Seong Hwang Short Description:

Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes... Read more

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Publisher: Springer-Verlag New York Inc.
Publication Date: 23/08/2016
ISBN13: 9781489979438, 978-1489979438
ISBN10: 1489979433

Number of Pages: 263

Non Fiction , Mathematics & Science , Education