Description

Book Synopsis
This book contains proposals to redesign the scanning electron microscope, so that it is more compatible with other charged particle beam instrumentation and analytical techniques commonly used in surface science research. It emphasizes the concepts underlying spectrometer designs in the scanning electron microscope, and spectrometers are discussed under one common framework so that their relative strengths and weaknesses can be more readily appreciated. This is done, for the most part, through simulations and derivations carried out by the author himself.The book is aimed at scientists, engineers and graduate students whose research area or study in some way involves the scanning electron microscope and/or charged particle spectrometers. It can be used both as an introduction to these subjects and as a guide to more advanced topics about scanning electron microscope redesign.

Table of Contents
Introduction; Conventional SEM Design; Objective Lens Improvements; Abberation Correction for SEM; Electron Spectrometers and Filters; Secondary Electron Spectrometers; Auger Electron Spectrometers; Backscattered Electron Spectrometers; An Add-on Transmission Electron Energy Loss Spectrometer Attachment; Full-Range Energy Spectrometer Designs; A Multi-beam Spectra-Microscope Proposal.

Scanning Electron Microscope Optics And

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    A Hardback by Anjam Khursheed

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      Book details

      Publisher World Scientific Publishing Co Pte Ltd
      Published 3 November 2010
      ISBN-13 9789812836670
      978-9812836670
      ISBN-10 9812836675
      Also in:
      Scanning systems and technology

      Description

      Book Synopsis
      This book contains proposals to redesign the scanning electron microscope, so that it is more compatible with other charged particle beam instrumentation and analytical techniques commonly used in surface science research. It emphasizes the concepts underlying spectrometer designs in the scanning electron microscope, and spectrometers are discussed under one common framework so that their relative strengths and weaknesses can be more readily appreciated. This is done, for the most part, through simulations and derivations carried out by the author himself.The book is aimed at scientists, engineers and graduate students whose research area or study in some way involves the scanning electron microscope and/or charged particle spectrometers. It can be used both as an introduction to these subjects and as a guide to more advanced topics about scanning electron microscope redesign.

      Table of Contents
      Introduction; Conventional SEM Design; Objective Lens Improvements; Abberation Correction for SEM; Electron Spectrometers and Filters; Secondary Electron Spectrometers; Auger Electron Spectrometers; Backscattered Electron Spectrometers; An Add-on Transmission Electron Energy Loss Spectrometer Attachment; Full-Range Energy Spectrometer Designs; A Multi-beam Spectra-Microscope Proposal.

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