Description
Book SynopsisDuring the last 20 years interest in high-resolution x-ray diffractometry and reflectivity has grown as a result of the development of the semiconductor industry and the increasing interest in material research of thin layers of magnetic, organic, and other materials.
Table of Contents1 Elements for Designing an X-Ray Diffraction Experiment.- 2 Diffractometers and Reflectometers.- 3 Scans and Resolution in Angular and Reciprocal Space.- 4 Basic Principles.- 5 Kinematical Theory.- 6 Dynamical Theory.- 7 Semikinematical Theory.- 8 Determination of Layer Thicknesses of Single Layers and Multilayers.- 9 Lattice Parameters and Strains in Epitaxial Layers and Multilayers.- 10 Diffuse Scattering From Volume Defects in Thin Layers.- 11 X-Ray Scattering by Rough Multilayers.- 12 X-Ray Scattering by Artificially Lateral Semiconductor Nanostructures.- 13 Strain Analysis in Periodic Nanostructures.- 14 X-Ray Scattering from Self-Organized Structures.- References.
