Description
Book SynopsisAn interdisciplinary work offering an introduction to the basic principles and operational characteristics of semiconductor sensors. Describes sensor technology, stressing bulk and surface micromachining. Considers a sensor group related to a special physical, chemical or biological input signal. The final chapter deals with integrated sensors.
Table of ContentsClassification and Terminology of Sensors (S. Sze).
Semiconductor Sensor Technologies (C. Mastrangelo & W. Tang).
Acoustic Sensors (M. Motamedi & R. White).
Mechanical Sensors (B. Kloeck & N. de Rooij).
Magnetic Sensors (H. Baltes & R. Castagnetti).
Radiation Sensors (S. Audet & J. Steigerwald).
Thermal Sensors (S. Van Herwaarden & G. Meijer).
Chemical Sensors (S. Morrison).
Biosensors (A. Dewa & W. Ko).
Integrated Sensors (K. Najafi, et al.).
Appendices.
Index.
