Description

Book Synopsis
An interdisciplinary work offering an introduction to the basic principles and operational characteristics of semiconductor sensors. Describes sensor technology, stressing bulk and surface micromachining. Considers a sensor group related to a special physical, chemical or biological input signal. The final chapter deals with integrated sensors.

Table of Contents
Classification and Terminology of Sensors (S. Sze).

Semiconductor Sensor Technologies (C. Mastrangelo & W. Tang).

Acoustic Sensors (M. Motamedi & R. White).

Mechanical Sensors (B. Kloeck & N. de Rooij).

Magnetic Sensors (H. Baltes & R. Castagnetti).

Radiation Sensors (S. Audet & J. Steigerwald).

Thermal Sensors (S. Van Herwaarden & G. Meijer).

Chemical Sensors (S. Morrison).

Biosensors (A. Dewa & W. Ko).

Integrated Sensors (K. Najafi, et al.).

Appendices.

Index.

Semiconductor Sensors

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    A Hardback by Simon M. Sze

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      Book details

      Publisher John Wiley & Sons Inc
      Published 8 November 1994
      ISBN-13 9780471546092
      978-0471546092
      ISBN-10 0471546097
      Also in:
      Condensed matter physics Electronic devices and materials Electronics and communications engineering

      Description

      Book Synopsis
      An interdisciplinary work offering an introduction to the basic principles and operational characteristics of semiconductor sensors. Describes sensor technology, stressing bulk and surface micromachining. Considers a sensor group related to a special physical, chemical or biological input signal. The final chapter deals with integrated sensors.

      Table of Contents
      Classification and Terminology of Sensors (S. Sze).

      Semiconductor Sensor Technologies (C. Mastrangelo & W. Tang).

      Acoustic Sensors (M. Motamedi & R. White).

      Mechanical Sensors (B. Kloeck & N. de Rooij).

      Magnetic Sensors (H. Baltes & R. Castagnetti).

      Radiation Sensors (S. Audet & J. Steigerwald).

      Thermal Sensors (S. Van Herwaarden & G. Meijer).

      Chemical Sensors (S. Morrison).

      Biosensors (A. Dewa & W. Ko).

      Integrated Sensors (K. Najafi, et al.).

      Appendices.

      Index.

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