Description

Book Synopsis
An interdisciplinary work offering an introduction to the basic principles and operational characteristics of semiconductor sensors. Describes sensor technology, stressing bulk and surface micromachining. Considers a sensor group related to a special physical, chemical or biological input signal. The final chapter deals with integrated sensors.

Table of Contents
Classification and Terminology of Sensors (S. Sze).

Semiconductor Sensor Technologies (C. Mastrangelo & W. Tang).

Acoustic Sensors (M. Motamedi & R. White).

Mechanical Sensors (B. Kloeck & N. de Rooij).

Magnetic Sensors (H. Baltes & R. Castagnetti).

Radiation Sensors (S. Audet & J. Steigerwald).

Thermal Sensors (S. Van Herwaarden & G. Meijer).

Chemical Sensors (S. Morrison).

Biosensors (A. Dewa & W. Ko).

Integrated Sensors (K. Najafi, et al.).

Appendices.

Index.

Semiconductor Sensors

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    A Hardback by Simon M. Sze

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      Publisher: John Wiley & Sons Inc
      Publication Date: 08/11/1994
      ISBN13: 9780471546092, 978-0471546092
      ISBN10: 0471546097

      Description

      Book Synopsis
      An interdisciplinary work offering an introduction to the basic principles and operational characteristics of semiconductor sensors. Describes sensor technology, stressing bulk and surface micromachining. Considers a sensor group related to a special physical, chemical or biological input signal. The final chapter deals with integrated sensors.

      Table of Contents
      Classification and Terminology of Sensors (S. Sze).

      Semiconductor Sensor Technologies (C. Mastrangelo & W. Tang).

      Acoustic Sensors (M. Motamedi & R. White).

      Mechanical Sensors (B. Kloeck & N. de Rooij).

      Magnetic Sensors (H. Baltes & R. Castagnetti).

      Radiation Sensors (S. Audet & J. Steigerwald).

      Thermal Sensors (S. Van Herwaarden & G. Meijer).

      Chemical Sensors (S. Morrison).

      Biosensors (A. Dewa & W. Ko).

      Integrated Sensors (K. Najafi, et al.).

      Appendices.

      Index.

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