Description

Book Synopsis
From the electronic nose and the intelligent ear to the modern ink jet nozzle, the applications of smart devices incorporating microsensors are increasing rapidly. Microsensors are miniature devices that convert a non--electrical quantity into an electrical signal. By integrating a microsensor with a microprocessor, a smart sensor is produced.

Table of Contents
Introduction

Electronic Materials and Processing

MEMS Materials and their Preparation

Standard Microelectronic Technologies

Silicon Micromachining:Bulk

Silicon Micromachining: Surface

Microstereolithography for MEMS

Microsensors

Introduction to SAW Devices

Surface Acoustic Waves in Solids

IDT Microsensor Parameter Measurement

IDT Microsensor Fabrication

IDT Microsensors

MEMS-IDT Microsensors

Smart Sensors and MEMS

Appendices

Index

Microsensors MEMS and Smart Devices Technology

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    A Hardback by Julian W. Gardner, Vijay K. Varadan, Osama O. Awadelkarim

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      View other formats and editions of Microsensors MEMS and Smart Devices Technology by Julian W. Gardner

      Publisher: John Wiley & Sons Inc
      Publication Date: 20/11/2001
      ISBN13: 9780471861096, 978-0471861096
      ISBN10: 047186109X
      Also in:
      Electronics and communications engineering Electronics: circuits and components Other manufacturing technologies

      Description

      Book Synopsis
      From the electronic nose and the intelligent ear to the modern ink jet nozzle, the applications of smart devices incorporating microsensors are increasing rapidly. Microsensors are miniature devices that convert a non--electrical quantity into an electrical signal. By integrating a microsensor with a microprocessor, a smart sensor is produced.

      Table of Contents
      Introduction

      Electronic Materials and Processing

      MEMS Materials and their Preparation

      Standard Microelectronic Technologies

      Silicon Micromachining:Bulk

      Silicon Micromachining: Surface

      Microstereolithography for MEMS

      Microsensors

      Introduction to SAW Devices

      Surface Acoustic Waves in Solids

      IDT Microsensor Parameter Measurement

      IDT Microsensor Fabrication

      IDT Microsensors

      MEMS-IDT Microsensors

      Smart Sensors and MEMS

      Appendices

      Index

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