Description

Book Synopsis
From the electronic nose and the intelligent ear to the modern ink jet nozzle, the applications of smart devices incorporating microsensors are increasing rapidly. Microsensors are miniature devices that convert a non--electrical quantity into an electrical signal. By integrating a microsensor with a microprocessor, a smart sensor is produced.

Table of Contents
Introduction

Electronic Materials and Processing

MEMS Materials and their Preparation

Standard Microelectronic Technologies

Silicon Micromachining:Bulk

Silicon Micromachining: Surface

Microstereolithography for MEMS

Microsensors

Introduction to SAW Devices

Surface Acoustic Waves in Solids

IDT Microsensor Parameter Measurement

IDT Microsensor Fabrication

IDT Microsensors

MEMS-IDT Microsensors

Smart Sensors and MEMS

Appendices

Index

Microsensors MEMS and Smart Devices Technology

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A Hardback by Julian W. Gardner, Vijay K. Varadan, Osama O. Awadelkarim

15 in stock


    View other formats and editions of Microsensors MEMS and Smart Devices Technology by Julian W. Gardner

    Publisher: John Wiley & Sons Inc
    Publication Date: 20/11/2001
    ISBN13: 9780471861096, 978-0471861096
    ISBN10: 047186109X
    Also in:
    Electronics and communications engineering Electronics: circuits and components Other manufacturing technologies

    Description

    Book Synopsis
    From the electronic nose and the intelligent ear to the modern ink jet nozzle, the applications of smart devices incorporating microsensors are increasing rapidly. Microsensors are miniature devices that convert a non--electrical quantity into an electrical signal. By integrating a microsensor with a microprocessor, a smart sensor is produced.

    Table of Contents
    Introduction

    Electronic Materials and Processing

    MEMS Materials and their Preparation

    Standard Microelectronic Technologies

    Silicon Micromachining:Bulk

    Silicon Micromachining: Surface

    Microstereolithography for MEMS

    Microsensors

    Introduction to SAW Devices

    Surface Acoustic Waves in Solids

    IDT Microsensor Parameter Measurement

    IDT Microsensor Fabrication

    IDT Microsensors

    MEMS-IDT Microsensors

    Smart Sensors and MEMS

    Appendices

    Index

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