Description
Book SynopsisHow Can We Lower the Power Consumption of Gas Sensors?
There is a growing demand for low-power, high-density gas sensor arrays that can overcome problems relative to high power consumption. Low power consumption is a prerequisite for any type of sensor system to operate at optimum efficiency. Focused on fabrication-friendly microelectromechanical systems (MEMS) and other areas of sensor technology, MEMS and Nanotechnology for Gas Sensors explores the distinct advantages of using MEMS in low power consumption, and provides extensive coverage of the MEMS/nanotechnology platform for gas sensor applications.
This book outlines the microfabrication technology needed to fabricate a gas sensor on a MEMS platform. It discusses semiconductors, graphene, nanocrystalline ZnO-based microfabricated sensors, and nanostructures for volatile organic compounds. It also includes performance parameters for the state of the art of sensors, and the applicatio
Trade Review
"…this book is an outstanding, broad overview of basics, concepts, specific materials used for each sensing application, and techniques employed in current, emerging, and possible future MEMS applications. I strongly recommend this book to all research students interested in MEMS and gas sensors."
—MRS Bulletin, December 2016
Table of ContentsSection I: Fabrication Procedure. Introduction. Substrate for MEMS. Deposition. Photolithography: Pattern Transfer. Structuring MEMS: Micromachining. Microheaters for Gas Sensor. Section II: Sensor Applications. Sensing with Graphene. Nanocrystalline ZnO-Based Microfabricated Chemical Sensor. Nanostructures for Volatile Organic Compound Detection. Sensor Interfaces. MEMS- and Nanotechnology-Enabled Sensor Applications.
