Description

Book Synopsis
This book brings together the most useful and important data on chemicals and gases used in the manufacture of semiconductor devices. It offers an A-to-Z listing of physical properties and safety information for more than 270 chemicals and gases used in the manufacture of semiconductor chips.

Table of Contents
Thin Film Deposition Materials.

Wafer Cleaning Chemicals.

Photolithography Materials.

Wet and Dry Etching Materials.

Chemical Mechanical Planarizing Materials.

Carrier Gases.

Uncategorized Materials.

Semiconductor Chemicals Analysis.

Index.

Handbook of Chemicals and Gases for the

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A Hardback by Ashutosh Misra, Jeremiah D. Hogan, Russell A. Chorush

15 in stock


    View other formats and editions of Handbook of Chemicals and Gases for the by Ashutosh Misra

    Publisher: John Wiley & Sons Inc
    Publication Date: 05/04/2002
    ISBN13: 9780471316718, 978-0471316718
    ISBN10: 0471316717

    Description

    Book Synopsis
    This book brings together the most useful and important data on chemicals and gases used in the manufacture of semiconductor devices. It offers an A-to-Z listing of physical properties and safety information for more than 270 chemicals and gases used in the manufacture of semiconductor chips.

    Table of Contents
    Thin Film Deposition Materials.

    Wafer Cleaning Chemicals.

    Photolithography Materials.

    Wet and Dry Etching Materials.

    Chemical Mechanical Planarizing Materials.

    Carrier Gases.

    Uncategorized Materials.

    Semiconductor Chemicals Analysis.

    Index.

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