Engineering Thin Films and Nanostructures with Ion Beams
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Hardback by Emile Knystautas
Short Description:
While ion-beam techniques have been used to create thin films in the semiconductor industry for several decades, these methods have... Read more
Publisher: Taylor & Francis IncPublication Date: 06/04/2005
ISBN13: 9780824724474, 978-0824724474
ISBN10: 082472447X
Number of Pages: 590