Description

The practical, accessible independent-study guide and text on surface science fundamentals and microelectronics processes, this reference explains key concepts and important analytical techniques. It discusses films and interfaces, electronic passivation of semiconductor-dielectric film interfaces, the Si-SiO2 interface, and other MOSFET interfaces, and includes figures, charts, exercises, and examples of applications. This is the ideal guide to help professionals in the electronics industry get up to speed fast. It is also an excellent text for upper-level graduate and undergraduate students.

Surfaces, Interfaces, and Films for Microelectronics

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£163.95

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Hardback by Eugene A. Irene

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The practical, accessible independent-study guide and text on surface science fundamentals and microelectronics processes, this reference explains key concepts and... Read more

    Publisher: John Wiley & Sons Inc
    Publication Date: 11/03/2008
    ISBN13: 9780470174470, 978-0470174470
    ISBN10: 0470174471

    Number of Pages: 536

    Non Fiction , Technology, Engineering & Agriculture , Education

    Description

    The practical, accessible independent-study guide and text on surface science fundamentals and microelectronics processes, this reference explains key concepts and important analytical techniques. It discusses films and interfaces, electronic passivation of semiconductor-dielectric film interfaces, the Si-SiO2 interface, and other MOSFET interfaces, and includes figures, charts, exercises, and examples of applications. This is the ideal guide to help professionals in the electronics industry get up to speed fast. It is also an excellent text for upper-level graduate and undergraduate students.

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