Description

Book Synopsis
The practical, accessible independent-study guide and text on surface science fundamentals and microelectronics processes Electronic and microelectronic materials are vital to technologies such as semiconductors, integrated circuits, magnetic alloys, insulators, and optical/display materials.

Table of Contents
Preface.

Part I: Fundamentals of Surfaces and Interfaces.

1. Introduction to Surfaces.

2. Structure of Surfaces.

3. Thermodynamics of Surfaces and Interfaces.

4. Surface Roughness.

5. Surface electronic States.

6. Other Surface Probes.

7. Charged Surfaces.

8.Adsorption.

9. Elliposometry and Optical Properties of Surfaces, Interfaces, and Films.

Part II: Microelectronics Applications.

10. Films and Interfaces.

11. Electronic Passivation of Semiconductor-Dielectric Film Interfaces.

12. The Si-SiO2 Interface and Other MOSFET Interfaces.

Index.

Surfaces Interfaces and Films for

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    A Hardback by Eugene A. Irene

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      Publisher: John Wiley & Sons Inc
      Publication Date: 11/03/2008
      ISBN13: 9780470174470, 978-0470174470
      ISBN10: 0470174471
      Also in:
      Mechanical engineering and materials

      Description

      Book Synopsis
      The practical, accessible independent-study guide and text on surface science fundamentals and microelectronics processes Electronic and microelectronic materials are vital to technologies such as semiconductors, integrated circuits, magnetic alloys, insulators, and optical/display materials.

      Table of Contents
      Preface.

      Part I: Fundamentals of Surfaces and Interfaces.

      1. Introduction to Surfaces.

      2. Structure of Surfaces.

      3. Thermodynamics of Surfaces and Interfaces.

      4. Surface Roughness.

      5. Surface electronic States.

      6. Other Surface Probes.

      7. Charged Surfaces.

      8.Adsorption.

      9. Elliposometry and Optical Properties of Surfaces, Interfaces, and Films.

      Part II: Microelectronics Applications.

      10. Films and Interfaces.

      11. Electronic Passivation of Semiconductor-Dielectric Film Interfaces.

      12. The Si-SiO2 Interface and Other MOSFET Interfaces.

      Index.

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