Description

Book Synopsis
An integrated mathematical view of the physics and numerical modeling of optical projection lithography that covers the full spectrum of the important concepts. Readers with a good working knowledge of calculus can follow the development, technologists can gather concepts and the equations that result. The casual reader will gain a perspective.

Optical Imaging in Projection Microlithography

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    A Paperback by Alfred K. Wong

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      Book details

      Publisher MP-SPI SPIE Press
      Published 3/31/2005 12:00:00 AM
      ISBN-13 9780819458292
      978-0819458292
      ISBN-10 0819458295
      Also in:
      Applied optics

      Description

      Book Synopsis
      An integrated mathematical view of the physics and numerical modeling of optical projection lithography that covers the full spectrum of the important concepts. Readers with a good working knowledge of calculus can follow the development, technologists can gather concepts and the equations that result. The casual reader will gain a perspective.

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