Description

Book Synopsis
An integrated mathematical view of the physics and numerical modeling of optical projection lithography that covers the full spectrum of the important concepts. Readers with a good working knowledge of calculus can follow the development, technologists can gather concepts and the equations that result. The casual reader will gain a perspective.

Optical Imaging in Projection Microlithography

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A Paperback by Alfred K. Wong

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    View other formats and editions of Optical Imaging in Projection Microlithography by Alfred K. Wong

    Publisher: MP-SPI SPIE Press
    Publication Date: 3/31/2005 12:00:00 AM
    ISBN13: 9780819458292, 978-0819458292
    ISBN10: 0819458295
    Also in:
    Applied optics

    Description

    Book Synopsis
    An integrated mathematical view of the physics and numerical modeling of optical projection lithography that covers the full spectrum of the important concepts. Readers with a good working knowledge of calculus can follow the development, technologists can gather concepts and the equations that result. The casual reader will gain a perspective.

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