Description
Book SynopsisMaster fundamental technologies for modern semiconductor integrated circuits with this definitive textbook, for students from a range of STEM backgrounds, with a focus on big-picture thinking and industry-grade simulation. Includes over 450 full-color figures and over 280 homework problems, with solutions and lecture slides for instructors.
Trade Review'Covering the latest advances in chip manufacturing, this is a timely and valuable contribution by two of the leading researchers in the field.' Sanjay Banerjee, The University of Texas at Austin
'Comprehensive and timely. This new edition retains the characteristic balance between fundamental aspects, fabrication details, and simulation specifics. Its historical particulars are both thrilling and stimulating.' Shi-Li Zhang, Uppsala University
'A timely and resourceful edition that addresses semiconductor talent development in the coming years. More than 100 of my undergraduate and graduate students have found this text an enriching resource for expanding their understanding about semiconductor processes.' Muhammad Hussain, Purdue University
Table of Contents1. Historical Perspective, Moore's Law and Future Technology Prospects; 2. Modern CMOS Technology; 3. Semiconductor Materials = Crystal Growth, Wafer Preparation and Material Properties; 4. Semiconductor Manufacturing – Clean Rooms, Wafer Cleaning, Gettering and Chip Yield; 5. Lithography; 6. Semiconductor/Insulator Interfaces; 7. Doping in Semiconductors; 8. Ion Implantation; 9. Etching Technologies and Chemical-Mechanical Polishing; 10. Deposition Technologies; 11. Backend (Interconnect) Processing Technologies.
