EUV Lithography

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Hardback by Vivek Bakshi Short Description:

EUVL is an area of intense research and this book provides the foundation required for understanding and applying this technology.... Read more

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Publisher: John Wiley & Sons Inc
Publication Date: 16/01/2009
ISBN13: 9780470471555, 978-0470471555
ISBN10: 0470471557

Number of Pages: 702

Non Fiction , Technology, Engineering & Agriculture , Education