Description

Book Synopsis
EUVL is an area of intense research and this book provides the foundation required for understanding and applying this technology. It offers contributions from the world's leading EUVL researchers, and provides all the critical information needed by practitioners and those wanting to enter the field.

EUV Lithography

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    A Hardback by Vivek Bakshi

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      Publisher: John Wiley & Sons Inc
      Publication Date: 16/01/2009
      ISBN13: 9780470471555, 978-0470471555
      ISBN10: 0470471557
      Also in:
      Mechanical engineering and materials

      Description

      Book Synopsis
      EUVL is an area of intense research and this book provides the foundation required for understanding and applying this technology. It offers contributions from the world's leading EUVL researchers, and provides all the critical information needed by practitioners and those wanting to enter the field.

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