Description

Book Synopsis
EUVL is an area of intense research and this book provides the foundation required for understanding and applying this technology. It offers contributions from the world's leading EUVL researchers, and provides all the critical information needed by practitioners and those wanting to enter the field.

EUV Lithography

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    A Hardback by Vivek Bakshi

    £102.56

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      Book details

      Publisher John Wiley & Sons Inc
      Published 16 January 2009
      ISBN-13 9780470471555
      978-0470471555
      ISBN-10 0470471557
      Also in:
      Mechanical engineering and materials

      Description

      Book Synopsis
      EUVL is an area of intense research and this book provides the foundation required for understanding and applying this technology. It offers contributions from the world's leading EUVL researchers, and provides all the critical information needed by practitioners and those wanting to enter the field.

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