Description

Book Synopsis

Silicon, as a single-crystal semiconductor, has sparked a revolution in the field of electronics and touched nearly every field of science and technology. Though available abundantly as silica and in various other forms in nature, silicon is difficult to separate from its chemical compounds because of its reactivity. As a solid, silicon is chemically inert and stable, but growing it as a single crystal creates many technological challenges.

Crystal Growth and Evaluation of Silicon for VLSI and ULSI is one of the first books to cover the systematic growth of silicon single crystals and the complete evaluation of silicon, from sand to useful wafers for device fabrication. Written for engineers and researchers working in semiconductor fabrication industries, this practical text:

  • Describes different techniques used to grow silicon single crystals
  • Explains how grown single-crystal ingots become a complete silicon wafer for integrated-circuit fabrication
    Table of Contents

    Introduction. Silicon: The Key Material for Integrated Circuit Fabrication Technology. Importance of Single Crystals for Integrated Circuit Fabrication. Different Techniques for Growing Single-Crystal Silicon. From Silicon Ingots to Silicon Wafers. Evaluation of Silicon Wafers. Resistivity and Impurity Concentration Mapping of Silicon Wafers. Impurities in Silicon Wafers. Defects in Silicon Wafers. Silicon Wafer Preparation for VLSI and ULSI Processing. Packing of Silicon Wafers.

Crystal Growth and Evaluation of Silicon for VLSI

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A Hardback by Golla Eranna

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    View other formats and editions of Crystal Growth and Evaluation of Silicon for VLSI by Golla Eranna

    Publisher: Taylor & Francis Inc
    Publication Date: 08/12/2014
    ISBN13: 9781482232813, 978-1482232813
    ISBN10: 1482232812
    Also in:
    Electrical engineering Microwave technology

    Description

    Book Synopsis

    Silicon, as a single-crystal semiconductor, has sparked a revolution in the field of electronics and touched nearly every field of science and technology. Though available abundantly as silica and in various other forms in nature, silicon is difficult to separate from its chemical compounds because of its reactivity. As a solid, silicon is chemically inert and stable, but growing it as a single crystal creates many technological challenges.

    Crystal Growth and Evaluation of Silicon for VLSI and ULSI is one of the first books to cover the systematic growth of silicon single crystals and the complete evaluation of silicon, from sand to useful wafers for device fabrication. Written for engineers and researchers working in semiconductor fabrication industries, this practical text:

    • Describes different techniques used to grow silicon single crystals
    • Explains how grown single-crystal ingots become a complete silicon wafer for integrated-circuit fabrication
      Table of Contents

      Introduction. Silicon: The Key Material for Integrated Circuit Fabrication Technology. Importance of Single Crystals for Integrated Circuit Fabrication. Different Techniques for Growing Single-Crystal Silicon. From Silicon Ingots to Silicon Wafers. Evaluation of Silicon Wafers. Resistivity and Impurity Concentration Mapping of Silicon Wafers. Impurities in Silicon Wafers. Defects in Silicon Wafers. Silicon Wafer Preparation for VLSI and ULSI Processing. Packing of Silicon Wafers.

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