Description
Book SynopsisSoft X-rays have great potential for use in a wide variety of applications, including the semiconductor industry and the life sciences. X-Rays from Laser Plasmas: Generation and Applications focuses exclusively and in detail on the science and technology of soft X-rays produced with non-synchrotron sources. Using a minimum of mathematical formulae, it discusses how such X-rays can be efficiently and economically generated from plasmas produced by lasers, and how they interact with matter. Authored by Dr Edmond Turcu, one of the pioneers in this field, X-Rays from Laser Plasmas: Generation and Applications will be of great interest to a wide variety of readers, including all those working in X-ray lithography, microscopy, and radiobiology.
Table of ContentsPHYSICAL PRINCIPLES.
Interaction of Soft X-Rays with Matter: Wave Behaviour (lambda ~ 1 nm).
Interaction of Soft X-rays with Matter: Particle Behavior (hv ~ 1 keV).
Laser-Produced Plasmas.
Excimer Lasers.
X-RAY SOURCE CONSTRUCTION, PERFORMANCE AND APPLICATIONS.
High Power KrF Lasers for X-Ray Generation.
High-Power Laser Plasma X-Ray Source.
X-Ray Microscopy.
X-Ray Micro- and Nano-Engineering.
Soft X-Ray Radiobiology.
Conclusions.
Index.