Description
Book SynopsisThis book provides several examples of how diverse nanofabrication techniques are being used by researchers across the world to fabricate useful materials and devices. A number of research groups present their cutting-edge work on fabricating a variety of nanoscale structures such as split rings, wires, gaps, trenches and holes. The innovative techniques described in this book will be of interest to all who are engaged in research and development of nanofabrication technologies. The book mainly covers application areas in electronics and photonics but the techniques are general enough to be applied to other areas.
Trade Review"This fine book brings together a very interesting and promising range of techniques found in some of the most advanced labs around the world that are pushing the boundaries of what is possible via the growth and fabrication of nanostructures for a variety of applications. Many unique methods and approaches summarized in this book have immense potential to precisely tailor the geometry and composition of materials at the nanoscale, enabling them to interact with outside stimuli in ways that were neither possible nor thinkable a decade ago. The showcase gallery is a gem on its own right and is a real eye-popper."
—Prof. Savas Kaya - Ohio University, USA
Table of ContentsPreface. Nanosphere lithography for high-density nanopatterning. Dry etching of semiconductors at the nano and micro scale. Nanoscale split ring resonator-based metamaterials. Nanofabrication of high-performance light-emitting diodes. On-film formation of nanowires: A route to defect-free nanowire growth and device fabrication. Nanotrenches: an optical lithography process for high aspect ratio sub-100 nm gaps. High aspect ratio metallic nanostructures for transparent electrodes. Fabrication of nanogap electrodes by electroless- and electro-deposition. Nanometer-scale processing by tribological action and its potential applications. Nano-materials integration on CMOS platforms. Focused ion beam fabrication of metallic nanostructures. Naotechnology showcase.