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Book Synopsis
The main focus of this book is ULSI front-end technology. It covers from the early history of semiconductor science & technology from 1874 to state-of-the-art FINFET technology in 2016. Some ULSI back-end technology is also covered, for example, the science and technology of MIM capacitors for analog CMOS has been included in this book.

Ulsi Front-end Technology: Covering From The

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    A Hardback by Wai Shing Lau

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      Publisher: World Scientific Publishing Co Pte Ltd
      Publication Date: 13/10/2017
      ISBN13: 9789813222151, 978-9813222151
      ISBN10: 9813222158

      Description

      Book Synopsis
      The main focus of this book is ULSI front-end technology. It covers from the early history of semiconductor science & technology from 1874 to state-of-the-art FINFET technology in 2016. Some ULSI back-end technology is also covered, for example, the science and technology of MIM capacitors for analog CMOS has been included in this book.

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