Description

Book Synopsis
This book deals with key aspects of modelling, deposition and characterization of thin solid films. The main attention is paid to the physical vacuum deposition methods and particularly to the magnetron sputtering. Measurement methods for optical and electrical properties of thin films, that are described in the book, are based on the equipment situated in the thin-films laboratory of the Holon Institute of Technology (HIT). The book is written based on Dr Axelevitch's long experience (more than 30 years) in the field. It is mainly intended for students of microelectronics, electrooptics and nanotechnology specialties, as well as for practical engineers.

Thin Films Technology: Practical Manual For The

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A Hardback by Alexander Axelevitch

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    View other formats and editions of Thin Films Technology: Practical Manual For The by Alexander Axelevitch

    Publisher: World Scientific Publishing Co Pte Ltd
    Publication Date: 20/12/2021
    ISBN13: 9789811246326, 978-9811246326
    ISBN10: 9811246327
    Also in:
    Engineering applications of surface coatings and films

    Description

    Book Synopsis
    This book deals with key aspects of modelling, deposition and characterization of thin solid films. The main attention is paid to the physical vacuum deposition methods and particularly to the magnetron sputtering. Measurement methods for optical and electrical properties of thin films, that are described in the book, are based on the equipment situated in the thin-films laboratory of the Holon Institute of Technology (HIT). The book is written based on Dr Axelevitch's long experience (more than 30 years) in the field. It is mainly intended for students of microelectronics, electrooptics and nanotechnology specialties, as well as for practical engineers.

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