Description

Book Synopsis
This book deals with key aspects of modelling, deposition and characterization of thin solid films. The main attention is paid to the physical vacuum deposition methods and particularly to the magnetron sputtering. Measurement methods for optical and electrical properties of thin films, that are described in the book, are based on the equipment situated in the thin-films laboratory of the Holon Institute of Technology (HIT). The book is written based on Dr Axelevitch's long experience (more than 30 years) in the field. It is mainly intended for students of microelectronics, electrooptics and nanotechnology specialties, as well as for practical engineers.

Thin Films Technology: Practical Manual For The

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    A Hardback by Alexander Axelevitch

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      View other formats and editions of Thin Films Technology: Practical Manual For The by Alexander Axelevitch

      Publisher: World Scientific Publishing Co Pte Ltd
      Publication Date: 20/12/2021
      ISBN13: 9789811246326, 978-9811246326
      ISBN10: 9811246327

      Description

      Book Synopsis
      This book deals with key aspects of modelling, deposition and characterization of thin solid films. The main attention is paid to the physical vacuum deposition methods and particularly to the magnetron sputtering. Measurement methods for optical and electrical properties of thin films, that are described in the book, are based on the equipment situated in the thin-films laboratory of the Holon Institute of Technology (HIT). The book is written based on Dr Axelevitch's long experience (more than 30 years) in the field. It is mainly intended for students of microelectronics, electrooptics and nanotechnology specialties, as well as for practical engineers.

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