Simulation of Deposition Processes with PECVD Apparatus

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Hardback by Juergen Geiser , Meraa Arab Short Description:

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Publisher: Nova Science Publishers Inc
Publication Date: 01/01/2012
ISBN13: 9781621003656, 978-1621003656
ISBN10: 1621003655

Number of Pages: 144

Non Fiction , Technology, Engineering & Agriculture , Education