Description

The main purpose of this book is to remind new engineers in silicon foundry, the fundamental physical and chemical rules in major Front end treatments: oxidation, epitaxy, ion implantation and impurities diffusion.

Silicon Technologies: Ion Implantation and Thermal Treatment

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Hardback by Annie Baudrant

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The main purpose of this book is to remind new engineers in silicon foundry, the fundamental physical and chemical rules... Read more

    Publisher: ISTE Ltd and John Wiley & Sons Inc
    Publication Date: 10/06/2011
    ISBN13: 9781848212312, 978-1848212312
    ISBN10: 1848212313

    Number of Pages: 368

    Non Fiction , Technology, Engineering & Agriculture , Education

    Description

    The main purpose of this book is to remind new engineers in silicon foundry, the fundamental physical and chemical rules in major Front end treatments: oxidation, epitaxy, ion implantation and impurities diffusion.

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