Description

Book Synopsis
This textbook contains all the materials that an engineer needs to know to start a career in the semiconductor industry. It also provides readers with essential background information for semiconductor research. It is written by a professional who has been working in the field for over two decades and teaching the material to university students for the past 15 years. It includes process knowledge from raw material preparation to the passivation of chips in a modular format.

Table of Contents
Building Blocks for Integrated Circuits; Thermal Oxidation; Gas Kinetics and Plasma Physics; Chemical Vapor Deposition; Plasma-enhanced Chemical Vapor Deposition and Etching; Pattern Transfer: Photolithography; Pattern Generation: Photomask Processing; Doping Technology; Metallization and Silicidation; Planarization and CMP Technology; Copper and Low k.

Semiconductor Manufacturing Technology

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Order before 4pm today for delivery by Tue 23 Dec 2025.

A Hardback by Chue San Yoo

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    View other formats and editions of Semiconductor Manufacturing Technology by Chue San Yoo

    Publisher: World Scientific Publishing Co Pte Ltd
    Publication Date: 04/03/2008
    ISBN13: 9789812568236, 978-9812568236
    ISBN10: 9812568239
    Also in:
    Electronic devices and materials

    Description

    Book Synopsis
    This textbook contains all the materials that an engineer needs to know to start a career in the semiconductor industry. It also provides readers with essential background information for semiconductor research. It is written by a professional who has been working in the field for over two decades and teaching the material to university students for the past 15 years. It includes process knowledge from raw material preparation to the passivation of chips in a modular format.

    Table of Contents
    Building Blocks for Integrated Circuits; Thermal Oxidation; Gas Kinetics and Plasma Physics; Chemical Vapor Deposition; Plasma-enhanced Chemical Vapor Deposition and Etching; Pattern Transfer: Photolithography; Pattern Generation: Photomask Processing; Doping Technology; Metallization and Silicidation; Planarization and CMP Technology; Copper and Low k.

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