Description
Book SynopsisThis volume compiles essential contributions to the most innovative fields of Plasma Processes and Polymers. High-quality contributions cover the fields of plasma deposition, plasma treatment of polymers and other organic compounds, plasma processes under partial vacuum and at atmospheric pressure, biomedical, textile, automotive, and optical applications as well as surface treatment of bulk materials, clusters, particles and powders.
This unique collection of refereed papers is based on the best contributions presented at the 16th International Symposium on Plasma Chemistry in Taormina, Italy (ISPC-16, June 2003). A high class reference of relevance to a large audience in plasma community as well as in the area of its industrial applications.
Table of ContentsPreface xvii
List of Contributors xix
Part I Plasma Deposition of Thin Films 1
1 Polymer Surface Modification with Monofunctional Groups of Different Type and Density 3
J. Friedrich, G. Kühn, R. mix
1.1 Introduction 3
1.2 Experimental 9
1.3 Results 10
1.3.1 Kinetics of the Deposition of Copolymers 10
1.3.2 Variation of the Density of Functional Groups 10
1.3.3 Structure and Stability of Copolymers 14
1.3.4 Relation between Functional Groups of Copolymers and Surface Energy 15
1.3.5 Relation between Functional Groups of Copolymers and Adhesion 15
1.4 Discussion 19
2 RF-Plasma Deposition of SiOX and a-C:H as Barrier Coatings on Polymers 23
D. Hegemann, U. Schütz, C. Oehr
2.1 Introduction 23
2.2 Experimental 24
2.3 Results and Discussion 27
2.4 Conclusions 35
3 Upscaling of Plasma Processes for Carboxyl Functionalization 39
V. Sciarratta, D. Hegemann, M. Müller, U. Vohrer, C. Oehr
3.1 Introduction 39
3.2 Experimental 40
3.2.1 Materials 40
3.2.2 Plasma-Deposition Apparatus 40
3.2.3 Characterization Techniques 42
3.3 Results and Discussion 43
3.4 Conclusions 48
4 Deposition of Fluorocarbon Films on Al and SiO2 Surfaces in High-Density Fluorocarbon Plasmas: Selectivity and Surface Wettability 51
A. Tserepi, P. Bayiati, E. Gogolides, K. Misiakos, Ch. Cardinaud
4.1 Introduction 51
4.2 Experimental 52
4.3 Results and Discussion 54
4.3.1 Etching and Deposition in C4 F8 Plasmas 54
4.3.2 Etching and Deposition Experiments in CHF3 /CH4 Plasmas 58
4.3.3 FC Film Characterization: Chemical Composition 60
4.4 Conclusions 63
5 Hot-wire Plasma Deposition of Doped DLC Films on Fluorocarbon Polymers for Biomedical Applications 65
V.N. Vasilets, A. Hirose, Q. Yang, A. Singh, R. Sammynaiken, Yu.M. Shulga, A.V. Kuznetsov, V.I. Sevastianov
5.1 Introduction 65
5.2 Experimental Details 66
5.2.1 Preparation of Samples 66
5.2.2 Plasma Deposition Technique 66
5.2.3 Surface Characterization 67
5.2.4 Platelet-Adhesion Technique 68
5.3 Results and Discussion 68
5.3.1 Characterization of Deposited Film 68
5.3.2 Platelet Adhesion 73
6 Properties of Silicon Nitride by Room-Temperature Inductively Coupled Plasma Deposition 77
H. Zhou, C. Sim, A. Glidle. C. Hodson, R. Kinsey, C. D. W. Wilkinson
6.1 Introduction 77
6.2 Experimental Systems 78
6.3 Results and Discussion 79
6.4 Conclusions 85
7 Structural Analysis of Diamond-like Carbon Films Deposited by RF (13.56 MHz) in a Methane Gas Plasma Atmosphere 87
M. Ouchabane, M. Aoucher, A. Sekkal, K. Henda and H. Lahmar
7.1 Introduction 87
7.2 Experimental Procedure 88
7.2.1 Deposition Apparatus 88
7.2.2 Experimental Conditions 89
7.3 Results and Discussions 90
7.3.1 X-ray Auger Electron Spectroscopy (XAES) 90
7.3.2 Electron Energy Loss Spectroscopy (EELS) 91
7.4 Conclusion 93
8 Rate constant of HMDSO + O reaction in plasma afterglow 95
Vít Kudrle, Vojtěch Doleal, Antonín Tálsk™, Jan Janča
8.1 Introduction 95
8.2 Experimental 96
8.3 Calculation of the rate constant 97
8.4 Results and discussion 99
8.5 Conclusion 101
9 Plasma-Enhanced Thin-Film Deposition On Polycarbonates 103
B. Ulejczyk, T. Opalinska, L. Karpinski, K. Schmidt-Szalowski
9.1 Introduction 103
9.2 Experimental 104
9.3 Results 106
9.4 Discussion 112
9.5 Conclusions 114
10 Molecular Tailoring Coating on TiO2 Nanoparticle Surface by Plasma Polymerization 117
Jing Zhang, Feng Zhu, Changnian Shi, Li Sun, Ying Wang, Zhan Cheng, Ping Ji, Qinyu Yang, Ying Guo, Rongming Zhou, Hankun Xie, W. J. van Ooij, Jie Lian,Donglu Shi
10.1 Introduction 117
10.2 Experimental 119
10.3 Results and Discussions 120
10.3.1 Surface Morphology 120
10.3.2 Surface Molecular Structure 122
10.3.3 Dispersion Behavior of AA-Plasma-Polymer-Coated TiO2 Nanoparticles 124
10.4 Conclusion 127
Part II Plasma-Grafting of Functional Groups 129
11 Introduction of Acidic Functional Groups onto the Surface of Activated Carbons by Atmospheric-Pressure Nonthermal Plasma 131
Satoshi Kodama and Hidetoshi Sekiguchi
11.1 Introduction 131
11.2 Experimental 132
11.2.1 Materials 132
11.2.2 Plasma Treatment of the Samples 132
11.2.3 Characterization 136
11.3 Results and Discussion 137
11.3.1 Surface Chemistry 137
11.3.2 Surface Morphology 140
11.4 Conclusion 142
12 Treatment of Flexible Polyethylene with Low-pressure Plasma to Improve its Painting Properties 143
Asunción Martínez-García, Alejandra Segura-Domingo, Ana Sánchez-Reche, Santiago Gisbert-Soler
12.1 Introduction 143
12.2 Experimental 144
12.2.1 Materials 144
12.2.2 Experimental Techniques 144
12.3 Results and Discussion 145
12.3.1 Effect of Treatment Time 145
12.3.2 Effect of Plasma Power 150
12.3.3 Effect of the Pressure inside the Chamber 152
12.3.4 Durability of the Treatment Effect 153
12.4 Conclusions 154
13 Surface Modification of PVDF by Microwave Plasma Treatment for Electroless Metallization 157
Mihaela Pascu, Dominique Debarnot, S. Durand, Fabienne Poncin-Epaillard
13.1 Introduction 157
13.2 Materials and Methods 158
13.3 Results and Discussion 160
13.3.1 Contact-Angle and Weight-Loss Measurements 160
13.3.2 Aging Studies 166
13.3.3 XPS results 168
13.3.4 Titration of the Surface Amino Groups 170
13.3.5 Wide-Angle X-ray Diffraction 171
13.3.6 Preliminary Results on PVDF Metallization 173
13.3.7 Assays on Piezoelectric Coefficient Determination 174
13.4 Conclusion 175
14 Different Performance of Ar, O2 and CO2 RF Plasmas in the Adhesion of Thermoplastic Rubber to Polyurethane Adhesive 177
Ana B. Ortiz-Magán, M. Mercedes Pastor-Blas, José Miguel Martín-Martínez
14.1 Introduction 177
14.2 Experimental 178
14.2.1 Materials 178
14.2.2 Experimental Techniques 179
14.3 Results and Discussion 180
14.4 Conclusions 191
15 Low-temperature Plasma Treatment of Dry Empress-Tree Seeds 193
N. Puač, Z.Lj. Petrović, S.ivković, Z. Giba, D. Grubišić and A.R. Đorđević
15.1 Introduction 193
15.2 Experimental Setup 194
15.2.1 Power Transmitted to the Plasma 195
15.3 Paulownia tomentosa Steud 197
15.4 Results and Discussion 198
15.5 Conclusion 202
16 Ion-induced Chemical and Structural Modification of Polymer Surfaces 205
G. Suchaneck, M. Guenther, G. Gerlach, K. Sahre, K.-J. Eichhorn, B. Wolf, A. Deyneka, L. Jastrabik
16.1 Ion Modification of Polymers 205
16.1.1 Modification of Polymer Properties 206
16.1.2 Energy Transfer from Ions to Polymer 206
16.1.3 Ion-modified Polymers for Sensor Application 206
16.1.4 Objective of this Work 207
16.2 Experimental 208
16.2.1 Sample Preparation 208
16.2.2 Evaluation of Structural Changes 209
16.2.3 Evaluation of Moisture Uptake 210
16.2.4 Electrical Measurements 210
16.3 Results and Discussion 211
16.3.1 Structural Changes 211
16.3.2 Moisture Uptake 216
16.3.3 Electrical Conductivity 219
16.4 Conclusions 219
17 Plasma-Enhanced Fluorination of Nitrile Butadiene Elastomer: an XPS study 223
A. Tressaud, E. Durand, C. Labrugère
17.1 Introduction 223
17.2 Experimental Procedure 224
17.2.1 Elastomer Samples 224
17.2.2 Fluorination Procedure: The Plasma-enhanced Fluorination (PEF) 224
17.2.3 XPS Characterization 225
17.3 Results and Comparison of the XPS Spectra 226
17.3.1 Plasma-enhanced Fluorination 226
17.3.2 Comparison with Direct F2-gas Fluorination 228
17.4 Concluding Remarks 231
18 Plasma-Surface Modification of Styrene-Butadiene Elastomers for Improved Adhesion 233
J. Tyczkowski, I. Krawczyk, B. Woźniak
18.1 Introduction 233
18.2 Experimental 236
18.2.1 Materials 236
18.2.2 Plasma Treatment 236
18.2.3 Wet-chemical Treatment 237
18.2.4 Surface-characterization Techniques 237
18.3 Results and Discussion 238
18.3.1 Preliminary Peel Test 238
18.3.2 Plasma Chlorination 238
18.3.3 CO2 and O2 Plasma Treatment 246
18.4 Conclusion 250
19 PET Surface after Plasma or Laser Treatment: Study of the Chemical Modifications and Adhesive Properties 253
P. Laurens, S. Petit, P. Bertrand, F. Arćfi-Khonsari
19.1 Introduction 253
19.2 Experimental Details 254
19.3 Results 257
19.3.1 Untreated PET 257
19.3.2 Plasma-treated PET 259
19.3.3 Laser-treated PET 260
19.4 Discussion 264
19.4.1 Surface Oxidation 264
19.4.2 Surface Degradation 265
19.4.3 Al–PET Adhesion 267
19.5 Conclusion 268
20 Plasma Pretreatments and Treatments on Polytetrafluoroethylene for Reducing the Hydrophobic Recovery 271
P. Favia, A. Milella, L. Iacobelli, R. d’Agostino
20.1 Introduction 271
20.2 Experimental 273
20.3 Results and Discussion 274
20.4 Conclusions 279
21 Oxygen-plasma Modification of Polyhedral Oligomeric Silsesquioxane (POSS) containing Copolymers for Micro- and Nanofabrication 281
N. Vourdas, V. Bellas, E. Tegou, O. Brani, V. Constantoudis, P. Argitis, A. Tserepi and E. Gogolides, D. Eon, G. Cartry, C. Cardinaud
21.1 Introduction and Experimental Conditions 281
21.2 Results and Discussion 284
21.2.1 Etching of POSS Copolymers in Oxygen Plasmas 284
12.2 Surface Roughness of POSS Polymers after Plasma Treatment 287
21.3 Conclusions 291
Part III Plasma and Life Science 293
22 Radicals of Plasma Needle Detected with Fluorescent Probe 295
Ingrid E. Kieft, Joep J.B.N. van Berkel, Erik R. Kieft, Eva Stoffels
22.1 Introduction 295
22.2 Experimental 297
22.2.1 Plasma Needle 297
22.2.2 Raman Scattering 298
22.2.3 Fluorescent Probe 298
22.2.4 Calibration with NO Radicals 299
22.2.5 Plasma Treatment 301
22.3 Results and Discussion 301
22.3.1 Raman Scattering 301
22.3.2 The Fluorescent Probe Measurements 302
22.4 Conclusions 307
23 RF-Plasma Treatment on the Inside of Small Functional Devices for Biomedical Application 309
C. Oehr, D. Hegemann, M. Müller, U. Vohrer, M. Storr
23.1 Introduction 309
23.2 Experimental 310
23.3 Results and Discussion 311
23.3.1 Devices with Geometrically Well-described Trenches Oriented Parallel to the Applied Field 311
23.3.2 Devices with Geometrically Defined Trenches Oriented Nonparallel to the Applied Field 313
23.3.3 Devices with Pores in Micrometer Dimension 314
23.4 Conclusions 317
24 Plasma Sterilisation: Mechanisms Overview and Influence of Discharge Parameters 319
Francois Rossi, Riccardo De Mitri, Sophie Bobin and Rosy Eloy
24.1 Introduction 319
24.2 Experimental 320
24.3 Results 322
24.4 Discussion 329
24.5 Conclusions 330
25 Improvement of Low-pressure Microwave Plasma-assisted Amino Functionalization of Polymers 333
K. Schröder, B. Finke, A. Ohl
25.1 Introduction 333
25.2 Experimental 336
25.2.1 Plasma Processing 336
25.2.2 Surface Diagnostics 337
25.3 Results and Discussion 338
25.3.1 Amino Functionalization in the UHV Plasma System 338
25.3.2 Amino Functionalization in the Low-Vacuum Plasma Reactor 343
25.4 Summary 347
26 PE-CVD Modification of Medical-grade PVC to Inhibit Bacterial Adhesion: PEO-like and Nanocomposite Ag/PEO-like Coatings 351
D.J. Balazs, K. Triandafillu, E. Sardella, G. Iacoviello, P. Favia, R. d’Agostino, H. Harms, and H.J. Mathieu
26.1 Introduction 351
26.2 Materials and Methods 353
26.2.1 Substrate Preparation 353
2.2 Plasma-Deposition Processes 354
26.2.3 Protein Adsorption 355
26.2.4 XPS Analysis 355
26.2.5 Contact-Angle Measurements 356
26.2.6 Bacterial Adhesion 356
26.3 Results and Discussion 357
26.3.1 PEO-like Film Deposition 357
26.3.2 Ag/PEO-like Films 360
26.2.3 Evaluation of Protein Adsorption 365
26.3.4 Evaluation of Bacterial Adhesion 367
26.4 Conclusion 369
27 Plasma-aided Micropatterning of Polystyrene Substrates for Driving Cell Adhesion and Spreading 373
E. Sardella, R. Gristina, G.S. Senesi, R. d’Agostino, P. Favia
27.1 Introduction 373
27.2 Materials and Methods 375
27.2.1 Surface Modifications 375
27.2.2 Surface Diagnostic 375
27.2.3 Cell Culture 376
27.3 Results and Discussion 377
27.3.1 PD-PEO-l Coatings 377
27.3.3 Micropatterning of PEO-like Coatings 381
27.4 Conclusions 385
28 Plasma-deposited Acrylic Acid Coatings on Flat and Nanostructured Substrates for Cell-Culture Experiments 389
L. Detomaso, R. Gristina, G.S. Senesi, L.C. Lopez, P. Favia, R. d’Agostino
28.1 Introduction 389
28.2 Experimental 390
28.2.1 Substrates 390
28.2.2 Plasma Reactors and Processes 391
28.2.3 Surface Characterization 391
28.2.4 Cell-Culture Experiments 392
28.3 Results and Discussion 392
28.4 Conclusions 400
29 The Model for Origin of Life Precursors Based on Exhaust Utilisation in the Electric Discharge 403
Marcela Morvová, Imrich Morva, František Hanic
29.1 Introduction 403
29.2 Experimental 404
29.3 Conclusions 411
Part IV Chemical Synthesis, Powders and Non-Equilibrium Effects 413
30 Gliding-Discharge CF 2 Cl 2 and CHF 2 Cl Decomposition in Reducing Conditions 415
Teresa Opalińska, Anna Opalska, Krzysztof Schmidt-Szałowski
30.1 Introduction 415
30.2 Experimental 417
30.2.1 Experimental Setup 417
30.2.2 Chemical Analysis 418
30.2.3 Conditions of Experiments 418
30.2.4 Definition of the Process Parameters 419
30.3 Results and Discussion 420
30.3.1 Essential Parameters of the Process Characteristics 420
30.3.2 Main Reaction Products – Hydrocarbons and Carbon Black 422
30.3.3 Formation of Fluorine-containing Organic Compounds 424
30.3.4 Energetic Efficiency of the Process 426
30.4 Conclusions 426
31 The Oxidation of Streams for Diesel Fuels Formulations by Means of High-voltage Oxygen Plasmas 431
Pedro Patiño, Eugenio Farrera, and Aurora Mejía
31.1 Introduction 431
31.2 Experimental 432
31.2.1 Equipment 432
31.3 Results 433
31.3.1 Model Compounds 433
31.3.2 Streams and Fuel Oil 437
31.4 Discussion 437
31.5 Conclusions 439
32 Acetylene and Ethylene Carbon Blacks Production in Plasma Process 443
Tomasz Zieliński, Teresa Opalińska, Jacek Kijeński
32.1 Introduction 443
32.2 Experimental 444
32.2.1 Apparatus 444
32.2.2 Procedure 445
32.3 Results and Discussion 446
32.4 Conclusions 453
33 DCM Production in a Dusty-Plasma Trap 455
A. Ivanov, V. Mitin, A. Pal, A. Ryabinkin, A. Serov, E. Skryleva, A Starostin, V. Fortov, Yu. Shulga
33.1 Introduction 455
33.2 The Setup for DCM Production 456
33.3 Results and Discussion 458
33.3.1 Measurement of the Mean Nickel Content 459
33.3.2 Measurement of the Specific Surface 460
33.3.3 X-ray Diffraction Investigations 460
33.3.4 Magnetic Properties of the Processed Powder 461
33.3.5 X-ray Photoelectron Spectroscopy 462
33.4 Conclusion 463
34 Dust Particles in the dc Glow-Discharge Plasma: Self-organization and Peculiarities of Behavior 465
V.E. Fortov, A.G. Khrapak, V.I. Molotkov, O.F. Petrov, M.Y. Poustylnik, V.M. Torchinsky
34.1 Introduction 465
34.2 Experimental Setup 466
34.3 Plasma Crystals and Liquids 468
34.3.1 Structures of Spherical Grains 468
34.3.2 Plasma Liquid Crystal 469
34.4 Wave Phenomena 470
34.5 Diagnostics of the dc Glow-Discharge Plasma 472
34.5.1 Measurement of the Grain Charge 472
34.5.2 Application of Thermophoresis for Diagnostics of Dust-Particle Confinement 473
34.6 Conclusion 475
35 Controlled Growth of Carbon Nanotubes Using Pulsed Glow-Barrier Discharge 477
Tomohiro Nozaki, Yoshihito Kimura, Ken Okazaki, Shigeru Kado
35.1 Introduction 477
35.2 Experimental 478
35.3 General Aspects of Carbon-Nanotube Deposition with He-based APG 479
35.4 Aligned Nanotube Growth with Pulsed APG 481
35.4.1 Effect of Pulsed Voltage on Alignment 483
35.4.2 Growth Temperature and Pulse Duty 484
35.5 Concluding Remarks and Future Work 485
36 Investigation of Excited Species in a Carbon Ablation Plume in Nitrogen Gas Environment 489
M.A. Bratescu, Y. Sakai, N. Sakura, D. Yamaoka, Y. Suda and H. Sugawara
36.1 Introduction 489
36.2 Experimental Setup 490
36.3 Results and Discussion 492
36.4 Conclusions 497
37 Optimization of a DC-RF Hybrid Plasma Flow System Using Statistical Analysis 499
Kohtaro Kawajiri, Kandasamy Ramachandran and Hideya Nishiyama
37.1 Introduction 499
37.2 Experimental Apparatus and Procedures 500
37.3 Results and Discussion 503
37.3.1 Particle Residence Time 503
37.3.2 Appearance and Disappearance Voltages 505
37.3.3 Upper Limit of Injected Nitrogen Flow Rate 509
37.3.4 Downstream-Gas Temperature 514
37.3.5 Optimization 516
37.4 Conclusion 517
