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Book Synopsis
This book provides an in-depth, self-contained introduction of partially coherent imaging theory for researchers and engineers working on optical lithography for semiconductor manufacturing, including those in the EDA industry. It is mathematically complete: the opening chapters discuss the essential principles, and all derivations are presented with their intermediate steps. For increased accessibility, simplified and consistent notations are used throughout the text. Full-color pages illustrate the connections between figures and equations.

Optical Physics for Nanolithography

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    A Paperback / softback by Anthony Yen, Shinn-Sheng Yu

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      Publisher: SPIE Press
      Publication Date: Publication Date: 30/05/2018
      ISBN13: 9781510617377, 978-1510617377
      ISBN10: 151061737X

      Description

      Book Synopsis
      This book provides an in-depth, self-contained introduction of partially coherent imaging theory for researchers and engineers working on optical lithography for semiconductor manufacturing, including those in the EDA industry. It is mathematically complete: the opening chapters discuss the essential principles, and all derivations are presented with their intermediate steps. For increased accessibility, simplified and consistent notations are used throughout the text. Full-color pages illustrate the connections between figures and equations.

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