Description
Book SynopsisWhile many books are dedicated to individual aspects of nanofabrication, there is no single source that defines and explains the total vision of the field. Filling this gap, Nanofabrication Handbook presents a unique collection of new and the most important established approaches to nanofabrication. Contributors from leading research facilities and academic institutions around the world define subfields, offer practical instructions and examples, and pave the way for future research.
Helping readers to select the proper fabricating technique for their experiments, the book provides a broad vision of the most critical problems and explains how to solve them. It includes basic definitions and introduces the main underlying concepts of nanofabrication. The book also discusses the major advantages and disadvantages of each approach and offers a wide variety of examples of cutting-edge applications.
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Trade Review
"[T]his book goes beyond the description of most nanofabrication techniques to present several practical applications. ... the profuse use of drawings, illustrations, and pictures will help the reader visualize what is explained and discussed throughout the text. ... both the fundamentals and practical applications related to nanofabrication by lithographic techniques are well covered." -Raul J. Martin-Palma, Journal of Nanophotonics, 2013 "... expertly integrated ... The book is suitable for researchers and engineers in a variety of disciplines. I highly recommend it as a comprehensive introduction to nanofabrication techniques." -Barry R. Masters, Optics & Photonics News "Nanofabrication Handbook is a broad topical introduction to nanofabrication methods and applications. It is rich with illustrations and the authors of the individual chapters have made a real effort to introduce readers to the basic concepts in understandable terms while also capturing the current leading edge in their field. The amazing micrographs of prototype structures that are documented throughout the pages offer an inspiring snapshot of the many and varied accomplishments of the researchers working in these technology development and application fields ... The style used by the authors will allow this volume to serve as a solid introduction to methods in current use in nanoscale research while the breadth of topics will also permit experienced practitioners to learn about methods and applications outside their own areas of experience." -Donald Tennant, Director of Operations, Cornell NanoScale Science and Technology Facility "An impressive work covering all the important nanofabrication topics and contents ... Highly recommended." -Professor Din Ping Tsai, National Taiwan University
Table of Contents
STANDARD LITHOGRAPHY: Introduction to Nanofabrication. Electron Beam Lithography. Nanolithography with Focused Ion Beams. Focused Ion Beam and Electron Beam Deposition. Plasma-Assisted Pattern Transfer at the Nanoscale. Optical Lithography. Soft X-Ray Lithography. Simulations in Micro- and Nanofabrication. NEW LITHOGRAPHIC TECHNIQUES: Nanoimprint Lithography. Scanning Probe Lithography. Two-Photon Lithography. Colloidal Inorganic Nanocrystals: Synthesis and Controlled Assembly. Directed Self Assembly. Self-Assembled DNA Nanostructures and DNA Devices. Emerging New Approaches. NANOFABRICATION APPLICATIONS: Nano-Electro-Mechanical Systems (NEMS). Micro- and Nanofluidics. Fabrication of Nanophotonic Structures. Patterning Magnetic Nanostructures with Ions. Plasmonic Metamaterials. Nanoelectronics. Manipulation and Nanostructuring for Biological Applications.
