Description
Book SynopsisThis book is the first of its kind to collectively address design-based and mechanical micro-manufacturing topics in one place. Itfocuses on design andmaterials selection, as well as the manufacturing of micro-products using mechanical-based micro-manufacturing process technologies. After addressing the fundamentals and
non-metallic-based micro-manufacturing processes in the semiconductor industry, it goes on to address specific
metallic-based micro-manufacturing processes, such as:micro-forming, micro-machining, micro-molding, micro-laser processing, micro-layered manufacturing, micro-joining, micro-assembly and materials handling, and microEDM and ECM. The book provides an in-depth understanding of materials behavior at micro-scales and under different micro-scale processing conditions, while also including a wide variety of emerging micro-scale manufacturing issues and examples.
Table of ContentsForeword vii
Contributors ix
1 Fundamentals of Micro-Manufacturing 1
2 Micro-Fabrication Processes in Semiconductor Industry 25
3 Modeling and Analysis at Micro-Scales 43
4 Metrology, Inspection, and Process Control in Micro-Scales 71
5 Micro-Layered Manufacturing 97
6 Micro-Laser Processing 159
7 Polymer Micro-Molding/Forming Processes 197
8 Mechanical Micro-Machining 235
9 Micro-Forming 275
10 Micro-Electro Discharge Machining (μEDM) 301
11 Metal Injection Molding at Micro-Scales (μMIM) 347
Index 371
