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Book Synopsis

The completely revised Third Edition to the bestselling Microlithography: Science and Technology provides a balanced treatment of theoretical and operational considerations, from fundamental principles to advanced topics of nanoscale lithography. The book is divided into chapters covering all important aspects related to the imaging, materials, and processes that have been necessary to drive semiconductor lithography toward nanometer-scale generations. Renowned experts from the worldïâïs leading academic and industrial organizations have provided in-depth coverage of the technologies involved in optical, deep-ultraviolet (DUV), immersion, multiple patterning, extreme ultraviolet (EUV), maskless, nanoimprint, and directed self-assembly lithography, together with comprehensive descriptions of the advanced materials and processes involved.

New in the Third Edition

In addition to the full revision of existing chapters, this new Third Edition features coverage o

Microlithography

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    A Paperback by Bruce W. Smith

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      Book details

      Publisher CRC Press
      Published 6/24/2024
      ISBN-13 9781032836737
      978-1032836737
      ISBN-10 1032836733
      Also in:
      Technology, Engineering & Agriculture Electronics engineering

      Description

      Book Synopsis

      The completely revised Third Edition to the bestselling Microlithography: Science and Technology provides a balanced treatment of theoretical and operational considerations, from fundamental principles to advanced topics of nanoscale lithography. The book is divided into chapters covering all important aspects related to the imaging, materials, and processes that have been necessary to drive semiconductor lithography toward nanometer-scale generations. Renowned experts from the worldïâïs leading academic and industrial organizations have provided in-depth coverage of the technologies involved in optical, deep-ultraviolet (DUV), immersion, multiple patterning, extreme ultraviolet (EUV), maskless, nanoimprint, and directed self-assembly lithography, together with comprehensive descriptions of the advanced materials and processes involved.

      New in the Third Edition

      In addition to the full revision of existing chapters, this new Third Edition features coverage o

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