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Book Synopsis
The use of low dielectric constant (low-k) interdielectrics in multilevel structure integrated circuits (ICs) can lower line-to-line noise in interconnects and alleviate power dissipation issues by reducing the capacitance between the interconnect conductor lines. Because of these merits, low-k interdielectric materials are currently in high demand in the development of advanced ICs. One important approach to obtaining low-k values is the incorporation of nanopores into dielectrics. This book provides an overview of the methodologies and characterisation techniques used for investigating low-k nanoporous interdielectrics.

Low-K Nanoporous Interdielectrics: Materials,

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    A Paperback / softback by Moonhor Ree, Jinhwan Yoon, Kyuyoung Heo

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      View other formats and editions of Low-K Nanoporous Interdielectrics: Materials, by Moonhor Ree

      Publisher: Nova Science Publishers Inc
      Publication Date: Publication Date: 19/03/2011
      ISBN13: 9781616687496, 978-1616687496
      ISBN10: 1616687495

      Description

      Book Synopsis
      The use of low dielectric constant (low-k) interdielectrics in multilevel structure integrated circuits (ICs) can lower line-to-line noise in interconnects and alleviate power dissipation issues by reducing the capacitance between the interconnect conductor lines. Because of these merits, low-k interdielectric materials are currently in high demand in the development of advanced ICs. One important approach to obtaining low-k values is the incorporation of nanopores into dielectrics. This book provides an overview of the methodologies and characterisation techniques used for investigating low-k nanoporous interdielectrics.

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