Description
Book SynopsisIn this thesis the diffusion of anions and cations in HfO2 was investigated in detail. Furthermore, the conductivity of HfO2 was probed and approaches to interpret the results were presented. The diffusion of oxygen in dense ceramics of monoclinic HfO2 (m-HfO2) was studied by means of (18O/16O) isotope exchange annealing and Secondary Ion Mass Spectrometry (SIMS). All measured isotope profiles showed complicated behaviour in exhibiting two features: the first feature, closer to the surface, was attributed mainly to slow oxygen diffusion in an impurity silicate phase; the second feature, deeper in the sample, was attributed to oxygen diffusion in bulk m-HfO2. The activation enthalpy of oxygen tracer diffusion in bulk m-HfO2 was found to be ?HD* 0.5 eV. The diffusion of cations in m-HfO2 was studied with samples prepared by cooperation partners, utilising a low-temperature preparation method, atomic layer deposition, in order to produce non-equilibrium samples. These were then used i
