Description

Book Synopsis
In this book, we have attempted to produce a reference on high resolution focused ion beams (FIBs) that will be useful for both the user and the designer of FIB instrumentation.

Table of Contents
Preface. About the Authors. Introduction. 1. Field Ionization Sources. 2. Physics of Liquid Metal Ion Sources. 3. Ion Optics for LMIS. 4. Interactions of Ions with Solids. 5. Practical Focused Ion Beam Optics and Systems. 6. Applications of Focused Ion Beams. Appendix 1. Elements of the Theory of Field Desorption and Ionization. Appendix 2. Table of Sputter Yields. Index.

High Resolution Focused Ion Beams FIB and its

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A Paperback / softback by Jon Orloff, Lynwood Swanson, Mark Utlaut

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    View other formats and editions of High Resolution Focused Ion Beams FIB and its by Jon Orloff

    Publisher: Springer-Verlag New York Inc.
    Publication Date: 20/09/2012
    ISBN13: 9781461352297, 978-1461352297
    ISBN10: 1461352290

    Description

    Book Synopsis
    In this book, we have attempted to produce a reference on high resolution focused ion beams (FIBs) that will be useful for both the user and the designer of FIB instrumentation.

    Table of Contents
    Preface. About the Authors. Introduction. 1. Field Ionization Sources. 2. Physics of Liquid Metal Ion Sources. 3. Ion Optics for LMIS. 4. Interactions of Ions with Solids. 5. Practical Focused Ion Beam Optics and Systems. 6. Applications of Focused Ion Beams. Appendix 1. Elements of the Theory of Field Desorption and Ionization. Appendix 2. Table of Sputter Yields. Index.

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