Description

Book Synopsis
Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applications--practical techniques diligently related to fundamentals. Subjects range from voltage, distributions encountered in plasma etching systems to plasma-electron interactions that contribute to sustaining the discharge.

Table of Contents
Gases.

Gas Phase Collision Processes.

Plasmas.

DC Glow Discharges.

RF Discharges.

Sputtering.

Plasma Etching.

Appendices.

Index.

Glow Discharge Processes

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    A Hardback by Brian Chapman

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      Publisher: Wiley
      Publication Date: Publication Date: 05/11/1980
      ISBN13: 9780471078289, 978-0471078289
      ISBN10:

      Description

      Book Synopsis
      Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applications--practical techniques diligently related to fundamentals. Subjects range from voltage, distributions encountered in plasma etching systems to plasma-electron interactions that contribute to sustaining the discharge.

      Table of Contents
      Gases.

      Gas Phase Collision Processes.

      Plasmas.

      DC Glow Discharges.

      RF Discharges.

      Sputtering.

      Plasma Etching.

      Appendices.

      Index.

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