Description
Book SynopsisAmong the many intense light sources, excimer lasers have a unique set of properties that place them at the forefront of tooling for material processing.
Table of ContentsPreface. 1. Excimer Lasers: Current Status and Future Development; U. Rebhan, et al. 2. Compact Phototriggered Switchless Lasers and Very Large X-Ray Preionized Excimer Lasers: Innovative Technologies and New Excimer Lasers; M. Stehle. 3. Maintenance Issues of Excimer Lasers in a Production or Industrial Research Environment; G. Ogura. 4. Pulsed-Laser Ablation; D. Bäuerle, et al. 5. Photophysical Ablation of Organic Polymers; B. Luk'yanchuk, et al. 6. Dynamics of the Vapor Plume in Laser Materials Ablation; E. Stangl, et al. 7. Surface and Three-Dimensional Processing by Laser Chemical Vapor Deposition; O. Lehmann, et al. 8. Chemical Vapour Deposition of Crystalline and Amorphous Carbon, Silicon and Germanium Films; P. Hess. 9. Laser Excitation and Detection of Surface Acoustic Wave Pulses; P. Hess. 10. Gas and Adsorbed-Phase UV Photochemistry of Tetramethyltin (TMT) Probed by In-Situ Optical Diagnostics and Surface-Sensitive Techniques; E. Borsella, et al. 11. Materials Analysis Based on Quantitative Laser Ionization; H. Schroeder, et al. 12. Time-Resolved Diagnostics of Excimer Laser-Generated Ablation Plasmas Used for Pulsed Laser Deposition; D.B. Geohegan. 13. Excimer Laser Induced Permanent Electrical Conductivity and Nanostructures in Polymers; R. Sauerbrey, H.M. Phillips. 14. Photoablation and Surface Modification of Polymers with the Excimer Laser Radiation; S. Lazare, et al. 15. Process of Generating 3d-Microstructures with Excimer Lasers; H.K. Tonshoff, J. Mommsen. 16. Non-Coherent Structure Formation onUV-Laser Irradiated Polymers; E. Arenholz, et al. 17. An Innovative High Repetition Rate Shot Per Shot Acquisition System and its Application to a New Kind of Tropospheric LIDAR Measurement; D. Durieux, et al. 18. Detection of Heavy Metals in Environmental Samples Using Laser Spark Analysis; H. Schroeder, et al. 19. Applications of Excimer Laser Based Remote Sensing Systems to Problems Related to Water Pollution; R. Fantoni, et al. 20. Applications of Lasers in Microelectronics and Micromechanics; D.J. Ehrlich. 21. Excimer Laser for in situ Processing in Microelectronics; M. Meunier, et al. 22. Soft X-Ray Radiation from Excimer-Driven Laser-Plasma Sources; Application to Submicron Lithography; F. Bijkerk, A.P. Shevelko. 23. Excimer Laser Beam Interaction with Metals and Ceramics. Part I: Fundamental Aspects; K. Schutte, H.W. Bergmann. 24. Excimer Laser Beam Interaction with Metals and Ceramics. Part II: Materials Aspects and Applications; H.W. Bergmann, K. Schutte. 25. Pulsed Excimer Laser Crystallization and Doping for the Fabrication of Poly-Si and SiGe TFTs; E. Fogarassy, et al. 26. Excimer Laser Surface Treatment of a S.G. Cast Iron: Possible Application for the Running-In Part of the Automotive Motors; D. Pantelis, et al. 27. Transient Structural Modifications of Sintered Commercial Aluminum Nitride Ceramics Resulting from Low Fluence Excimer Laser Irradiation; A. Jadin, et al. 28. How to Implement New Technology on a Production Line: Via-Hole Drilling with KrF-laser as an Example; F. Bachmann. 29. Coronary Angioplasty with Excimer Laser; S. Avrillier. 30. Corneal Opt
