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Book Synopsis
Efficient Extreme Ultraviolet Mirror Design describes an approach to designing EUV mirrors with reduced computational time and memory requirements, providing a comprehensive grounding in the fundamentals of the EUV mirror and knowledge of the finite-difference time-domain (FDTD) method. It is an essential reference for EUV industry professionals.

Efficient Extreme Ultraviolet Mirror Design

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    A Hardback by Yen-Min Lee

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      Publisher: Institute of Physics Publishing
      Publication Date: Publication Date: 9/23/2021 12:00:00 AM
      ISBN13: 9780750326506, 978-0750326506
      ISBN10: 0750326506

      Description

      Book Synopsis
      Efficient Extreme Ultraviolet Mirror Design describes an approach to designing EUV mirrors with reduced computational time and memory requirements, providing a comprehensive grounding in the fundamentals of the EUV mirror and knowledge of the finite-difference time-domain (FDTD) method. It is an essential reference for EUV industry professionals.

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