Description



Table of Contents
Part One: Physics and chemistry of block copolymer (BCP) materials 1: Physics of block copolymers from bulk to thin films 2: RAFT synthesis of block copolymers and their self-assembly properties 3: Thermal and solvent annealing of block copolymer films 4: Field-theoretic simulations and self-consistent field theory for studying block copolymer directed self-assembly Part Two: Templates and patterning for directed self-assembly 5: Directed self-oriented self-assembly of block copolymers using topographical surfaces 6: Directed self-oriented self-assembly of block copolymers using chemically modified surfaces 7: X-ray characterization of directed self-assembly block copolymers 8: Self-assembly of block copolymers by graphoepitaxy Part Three: Application of directed self-assembly in nanomanufacturing 9: The inverse directed self-assembly problem 10: Directed self-assembly guiding template design for contact hole patterning 11: Modelling and analysis of large-scale, template self-assembly manufacturing techniques

Directed Selfassembly of Block Copolymers for Nanomanufacturing

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    A Hardback by Roel Gronheid, Paul Nealey

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      View other formats and editions of Directed Selfassembly of Block Copolymers for Nanomanufacturing by Roel Gronheid

      Publisher: Elsevier Science
      Publication Date: 8/10/2015 12:00:00 AM
      ISBN13: 9780081002506, 978-0081002506
      ISBN10: 0081002505

      Description



      Table of Contents
      Part One: Physics and chemistry of block copolymer (BCP) materials 1: Physics of block copolymers from bulk to thin films 2: RAFT synthesis of block copolymers and their self-assembly properties 3: Thermal and solvent annealing of block copolymer films 4: Field-theoretic simulations and self-consistent field theory for studying block copolymer directed self-assembly Part Two: Templates and patterning for directed self-assembly 5: Directed self-oriented self-assembly of block copolymers using topographical surfaces 6: Directed self-oriented self-assembly of block copolymers using chemically modified surfaces 7: X-ray characterization of directed self-assembly block copolymers 8: Self-assembly of block copolymers by graphoepitaxy Part Three: Application of directed self-assembly in nanomanufacturing 9: The inverse directed self-assembly problem 10: Directed self-assembly guiding template design for contact hole patterning 11: Modelling and analysis of large-scale, template self-assembly manufacturing techniques

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