Description
Table of Contents
Part One: Physics and chemistry of block copolymer (BCP) materials 1: Physics of block copolymers from bulk to thin films 2: RAFT synthesis of block copolymers and their self-assembly properties 3: Thermal and solvent annealing of block copolymer films 4: Field-theoretic simulations and self-consistent field theory for studying block copolymer directed self-assembly Part Two: Templates and patterning for directed self-assembly 5: Directed self-oriented self-assembly of block copolymers using topographical surfaces 6: Directed self-oriented self-assembly of block copolymers using chemically modified surfaces 7: X-ray characterization of directed self-assembly block copolymers 8: Self-assembly of block copolymers by graphoepitaxy Part Three: Application of directed self-assembly in nanomanufacturing 9: The inverse directed self-assembly problem 10: Directed self-assembly guiding template design for contact hole patterning 11: Modelling and analysis of large-scale, template self-assembly manufacturing techniques
