Defect Engineering in Transition Metal Based Nitride Thin Films by Energetic Treatment During Deposition
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Paperback / softback by Christina W�stefeld
Short Description:
Publisher:
Logos Verlag Berlin GmbH
Publication Date: 07/06/2016
ISBN13: 9783832542672, 978-3832542672
ISBN10: 3832542671
Number of Pages: 229
Non Fiction , Mathematics & Science , Education
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