Description

Book Synopsis
Provides a treatment of the chemical phenomena in lithography. This book presents topics on the optical and charged particle physics practiced in lithography, with a view of how the marriage between chemistry and optics has made possible the print and electronic revolutions of the digital age.

Table of Contents
Introduction; Invention of Lithography and Photolithography; Chemical and Optical Origins of Lithography; Evolution of Lithography; Lithographic Chemicals and Materials; Negative Resists; Positive Resists; General Considerations on the Radiation and Photochemistry of Resists; Anti-Reflection Coatings; Stone, Plate and Offset Lithography; The Semiconductor Lithographic Process; Lithographic Modeling; Optical Lithography; Charged Particle Lithography; Implementation of Lithography in Integrated Circuit Device Fabrication; Advanced Lithographic Processing.

Chemistry and Lithography

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    A Hardback by Uzodinma Okoroanyanwu

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      Publisher: John Wiley & Sons
      Publication Date: Publication Date: 2/28/2011 12:00:00 AM
      ISBN13: 9780819475626, 978-0819475626
      ISBN10: 0819475629

      Description

      Book Synopsis
      Provides a treatment of the chemical phenomena in lithography. This book presents topics on the optical and charged particle physics practiced in lithography, with a view of how the marriage between chemistry and optics has made possible the print and electronic revolutions of the digital age.

      Table of Contents
      Introduction; Invention of Lithography and Photolithography; Chemical and Optical Origins of Lithography; Evolution of Lithography; Lithographic Chemicals and Materials; Negative Resists; Positive Resists; General Considerations on the Radiation and Photochemistry of Resists; Anti-Reflection Coatings; Stone, Plate and Offset Lithography; The Semiconductor Lithographic Process; Lithographic Modeling; Optical Lithography; Charged Particle Lithography; Implementation of Lithography in Integrated Circuit Device Fabrication; Advanced Lithographic Processing.

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