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Book Synopsis
Silicon carbide (SiC) has been described as a suitable semiconductor material to use in MEMS and electronic devices for harsh environments. In recent years, many developments in SiC technology as bulk growth, materials processing, electronic devices and sensors have been shown. Moreover, some studies show the synthesis, characterisation and processing of crystalline SiC films. However, few works have investigated the potential of amorphous silicon carbide (a-SiC) thin films for sensors applications. This book presents fundamentals of amorphous silicon carbide thin films and their applications in piezoresistive sensors for high temperature applications.

Amorphous Silicon Carbide Thin Films: Deposition,

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    A Paperback / softback by Mariana Amorim Fraga

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      View other formats and editions of Amorphous Silicon Carbide Thin Films: Deposition, by Mariana Amorim Fraga

      Publisher: Nova Science Publishers Inc
      Publication Date: Publication Date: 12/01/2012
      ISBN13: 9781613247747, 978-1613247747
      ISBN10: 1613247745

      Description

      Book Synopsis
      Silicon carbide (SiC) has been described as a suitable semiconductor material to use in MEMS and electronic devices for harsh environments. In recent years, many developments in SiC technology as bulk growth, materials processing, electronic devices and sensors have been shown. Moreover, some studies show the synthesis, characterisation and processing of crystalline SiC films. However, few works have investigated the potential of amorphous silicon carbide (a-SiC) thin films for sensors applications. This book presents fundamentals of amorphous silicon carbide thin films and their applications in piezoresistive sensors for high temperature applications.

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