Description

Book Synopsis
Get the hands-on experience needed to design, fabricate and test MEMS devices with this practical guide. You will also learn to use foundry multi-project fabrication processes for low-cost MEMS projects, and end-of-chapter exercises and design challenges are provided, making this ideally suited for use in the classroom and by practising engineers.

Table of Contents
1. Introduction; 2. Micro-mechanics; 3. Electrostatics; 4. Optical MEMS; 5. Thermal MEMS; 6. Fluidic MEMS; 7. Package and test; 8. From prototype to product: MEMS deformable mirrors for adaptive optics.

A Guide to HandsOn MEMS Design and Prototyping

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    A Paperback by Joel A. Kubby

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      View other formats and editions of A Guide to HandsOn MEMS Design and Prototyping by Joel A. Kubby

      Publisher: Cambridge University Press
      Publication Date: 25/08/2011
      ISBN13: 9781107645790, 978-1107645790
      ISBN10:

      Description

      Book Synopsis
      Get the hands-on experience needed to design, fabricate and test MEMS devices with this practical guide. You will also learn to use foundry multi-project fabrication processes for low-cost MEMS projects, and end-of-chapter exercises and design challenges are provided, making this ideally suited for use in the classroom and by practising engineers.

      Table of Contents
      1. Introduction; 2. Micro-mechanics; 3. Electrostatics; 4. Optical MEMS; 5. Thermal MEMS; 6. Fluidic MEMS; 7. Package and test; 8. From prototype to product: MEMS deformable mirrors for adaptive optics.

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