{"product_id":"optical-physics-for-nanolithography-9781510617377","title":"Optical Physics for Nanolithography","description":"\u003cb\u003eBook Synopsis\u003c\/b\u003e\u003cbr\u003eThis book provides an in-depth, self-contained introduction of partially coherent imaging theory for researchers and engineers working on optical lithography for semiconductor manufacturing, including those in the EDA industry. It is mathematically complete: the opening chapters discuss the essential principles, and all derivations are presented with their intermediate steps. For increased accessibility, simplified and consistent notations are used throughout the text. Full-color pages illustrate the connections between figures and equations.","brand":"SPIE Press","offers":[{"title":"Default Title","offer_id":50059043930455,"sku":"9781510617377","price":77.6,"currency_code":"GBP","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0817\/1739\/5799\/files\/9781510617377.jpg?v=1740454393","url":"https:\/\/bookcurl.com\/products\/optical-physics-for-nanolithography-9781510617377","provider":"Book Curl","version":"1.0","type":"link"}