{"product_id":"introduction-to-microsystem-te-9780470058619","title":"Introduction to Microsystem Te","description":"\u003cb\u003eBook Synopsis\u003c\/b\u003e\u003cbr\u003eOver half a century after the discovery of the piezoresistive effect, microsystem technology has experienced considerable developments. Expanding the opportunities of microelectronics to non-electronic systems, its number of application fields continues to increase. Microsensors are one of the most important fields, used in medical applications and micromechanics. Microfluidic systems are also a significant area, most commonly used in ink-jet printer heads.  \u003cp\u003eThis textbook focuses on the essentials of microsystems technology, providing a knowledgeable grounding and a clear path through this well-established scientific dicipline. With a methodical, student-orientated approach, \u003ci\u003eIntroduction to Microsystem Technology\u003c\/i\u003e covers the following:\u003c\/p\u003e \u003cul type=\"disc\"\u003e \u003cli\u003emicrosystem materials (including silicon, polymers and thin films), and the scaling effects of going micro;\u003c\/li\u003e \u003cli\u003efabrication techniques based on different material properties, descriptions of their limitations and func\u003cbr\u003e\u003cbr\u003e\u003cb\u003eTable of Contents\u003c\/b\u003e\u003cbr\u003e\u003cb\u003ePreface.\u003c\/b\u003e  \u003cp\u003e\u003cb\u003eList of Symbols.\u003c\/b\u003e\u003c\/p\u003e \u003cp\u003e\u003cb\u003eList of Abbreviations.\u003c\/b\u003e\u003c\/p\u003e \u003cp\u003e\u003cb\u003e1 Introduction.\u003c\/b\u003e\u003c\/p\u003e \u003cp\u003e1.1 What is a Microsystem?\u003c\/p\u003e \u003cp\u003e1.2 Microelectronics and Microsystem Technology.\u003c\/p\u003e \u003cp\u003e1.3 Areas of Application and Trends of Development.\u003c\/p\u003e \u003cp\u003e1.4 Example: Yaw Rate Sensor.\u003c\/p\u003e \u003cp\u003e\u003cb\u003e2 Scaling and Similarity.\u003c\/b\u003e\u003c\/p\u003e \u003cp\u003e2.1 Scaling.\u003c\/p\u003e \u003cp\u003e2.2 Similarity and Dimensionless Numbers.\u003c\/p\u003e \u003cp\u003e\u003cb\u003e3 Materials.\u003c\/b\u003e\u003c\/p\u003e \u003cp\u003e3.1 Overview.\u003c\/p\u003e \u003cp\u003e3.2 Single Crystalline Silicon.\u003c\/p\u003e \u003cp\u003e3.3 Glasses.\u003c\/p\u003e \u003cp\u003e3.4 Polymers.\u003c\/p\u003e \u003cp\u003e3.5 Thin Films.\u003c\/p\u003e \u003cp\u003e3.6 Comparison of Material Characteristics.\u003c\/p\u003e \u003cp\u003e\u003cb\u003e4 Microfabrication.\u003c\/b\u003e\u003c\/p\u003e \u003cp\u003e4.1 Overview.\u003c\/p\u003e \u003cp\u003e4.2 Cleanliness During Production.\u003c\/p\u003e \u003cp\u003e4.3 Lithography.\u003c\/p\u003e \u003cp\u003e4.4 Thin-film Formation.\u003c\/p\u003e \u003cp\u003e4.5 Layer Patterning.\u003c\/p\u003e \u003cp\u003e4.6 Anisotropic Wet Chemical Deep Etching.\u003c\/p\u003e \u003cp\u003e4.7 Doping.\u003c\/p\u003e \u003cp\u003e4.8 Bonding Techniques.\u003c\/p\u003e \u003cp\u003e4.9 Insulation Techniques.\u003c\/p\u003e \u003cp\u003e4.10 Surface Micromachining.\u003c\/p\u003e \u003cp\u003e4.11 Near-surface Micromachining.\u003c\/p\u003e \u003cp\u003e4.12 HARMST.\u003c\/p\u003e \u003cp\u003e4.13 Miniaturized Classical Techniques.\u003c\/p\u003e \u003cp\u003e4.14 Selection of Microtechnical Manufacturing Techniques.\u003c\/p\u003e \u003cp\u003e\u003cb\u003e5 Packaging.\u003c\/b\u003e\u003c\/p\u003e \u003cp\u003e5.1 Tasks and Requirements.\u003c\/p\u003e \u003cp\u003e5.2 Functions of Packaging.\u003c\/p\u003e \u003cp\u003e\u003cb\u003e6 Function and Form Elements in Microsystem Technology.\u003c\/b\u003e\u003c\/p\u003e \u003cp\u003e6.1 Mechanical Elements.\u003c\/p\u003e \u003cp\u003e6.2 Fluidic Elements.\u003cbr\u003e \u003c\/p\u003e \u003cp\u003e6.3 Thermal Elements.\u003c\/p\u003e \u003cp\u003e\u003cb\u003e7 Sensors and Actuators.\u003c\/b\u003e\u003c\/p\u003e \u003cp\u003e7.1 Reversible and Parametric Transducers.\u003c\/p\u003e \u003cp\u003e7.2 Transducers for Sensors and Actuators.\u003c\/p\u003e \u003cp\u003e\u003cb\u003e8 Design of Microsystems.\u003c\/b\u003e\u003c\/p\u003e \u003cp\u003e8.1 Design Methods and Tools.\u003c\/p\u003e \u003cp\u003e8.2 Systems with Lumped Parameters.\u003c\/p\u003e \u003cp\u003e8.3 Systems with Distributed Parameters.\u003c\/p\u003e \u003cp\u003e\u003cb\u003e9 Effect of Technological Processes on Microsystem Properties.\u003c\/b\u003e\u003c\/p\u003e \u003cp\u003e9.1 Parameter-based Microsystem Design.\u003c\/p\u003e \u003cp\u003e9.2 Robust Microsystem Design.\u003c\/p\u003e \u003cp\u003e\u003cb\u003e10 The Future of Microsystems.\u003c\/b\u003e\u003c\/p\u003e \u003cp\u003e10.1 Status and Trends in Microsystem Technology.\u003c\/p\u003e \u003cp\u003e10.2 Microoptical Applications.\u003c\/p\u003e \u003cp\u003e10.3 Probe Tips.\u003c\/p\u003e \u003cp\u003e10.4 RF Microsystems.\u003c\/p\u003e \u003cp\u003e10.5 Actuators.\u003c\/p\u003e \u003cp\u003e10.6 Microfluidic Systems.\u003c\/p\u003e \u003cp\u003e10.7 Chemical, Biological and Medical Systems.\u003c\/p\u003e \u003cp\u003e10.8 Energy Harvesting and Wireless Communications.\u003c\/p\u003e \u003cp\u003e10.9 Micro Fuel Cells.\u003c\/p\u003e \u003cp\u003eReferences.\u003c\/p\u003e \u003cp\u003e\u003cb\u003eAppendix A Physical Constants.\u003c\/b\u003e\u003c\/p\u003e \u003cp\u003e\u003cb\u003eAppendix B Coordinate Transformation.\u003c\/b\u003e\u003c\/p\u003e \u003cp\u003eB.1 Elastic Coefficients.\u003c\/p\u003e \u003cp\u003eB.2 Piezoresistive Coefficients.\u003c\/p\u003e \u003cp\u003eReferences.\u003c\/p\u003e \u003cp\u003e\u003cb\u003eAppendix C Properties of Silicon Dioxide and Silicon Nitride Layers.\u003c\/b\u003e\u003c\/p\u003e \u003cp\u003eReferences.\u003c\/p\u003e \u003cp\u003e\u003cb\u003eAppendix D Nomenclature of Thin-film Processes.\u003c\/b\u003e\u003c\/p\u003e \u003cp\u003eReference.\u003c\/p\u003e \u003cp\u003e\u003cb\u003eAppendix E Adhesion of Surface Micromechanical Structures.\u003c\/b\u003e\u003c\/p\u003e \u003cp\u003eE.1 Capillary Forces.\u003c\/p\u003e \u003cp\u003eE.2 Critical Length of Cantilever Springs.\u003c\/p\u003e \u003cp\u003eReference.\u003c\/p\u003e \u003cp\u003e\u003cb\u003eIndex.\u003c\/b\u003e\u003c\/p\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e","brand":"Wiley","offers":[{"title":"Default Title","offer_id":51037067313495,"sku":"9780470058619","price":77.36,"currency_code":"GBP","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0817\/1739\/5799\/files\/9780470058619.jpg?v=1750934236","url":"https:\/\/bookcurl.com\/products\/introduction-to-microsystem-te-9780470058619","provider":"Book Curl","version":"1.0","type":"link"}