{"product_id":"introduction-to-microfabrication-9780470749838","title":"Introduction to Microfabrication","description":"\u003cb\u003eBook Synopsis\u003c\/b\u003e\u003cbr\u003eThe first edition of this book published in 2004 and has proved to be both a valuable textbook and a handy desk reference. This new edition continues to provide students with an accessible guide to an important field. Fully updated, it has five new chapters that incorporate the recent developments in the field.\u003cbr\u003e\u003cbr\u003e\u003cb\u003eTable of Contents\u003c\/b\u003e\u003cbr\u003ePreface to the First Edition.  \u003cp\u003ePreface to the Second Edition.\u003c\/p\u003e \u003cp\u003eAcknowledgements.\u003c\/p\u003e \u003cp\u003e1 Introduction.\u003c\/p\u003e \u003cp\u003eCharacterization.\u003c\/p\u003e \u003cp\u003e3 Simulation of Microfabrication Processes.\u003c\/p\u003e \u003cp\u003e4 Silicon.\u003c\/p\u003e \u003cp\u003e5 Thin-Film Materials and Processes.\u003c\/p\u003e \u003cp\u003e6 Epitaxy.\u003c\/p\u003e \u003cp\u003e7 Advanced Thin Films.\u003c\/p\u003e \u003cp\u003e8 Pattern Generation.\u003c\/p\u003e \u003cp\u003e9 Optical Lithography.\u003c\/p\u003e \u003cp\u003e10 Advanced Lithography.\u003c\/p\u003e \u003cp\u003e11 Etching.\u003c\/p\u003e \u003cp\u003e12 Wafer Cleaning and Surface Preparation.\u003c\/p\u003e \u003cp\u003e13 Thermal Oxidation.\u003c\/p\u003e \u003cp\u003e14 Diffusion.\u003c\/p\u003e \u003cp\u003e15 Ion Implantation.\u003c\/p\u003e \u003cp\u003e16 CMP: Chemical–Mechanical Polishing.\u003c\/p\u003e \u003cp\u003e17 Bonding.\u003c\/p\u003e \u003cp\u003e18 Polymer Microprocessing.\u003c\/p\u003e \u003cp\u003e19 Glass Microprocessing.\u003c\/p\u003e \u003cp\u003e20 Anisotropic Wet Etching.\u003c\/p\u003e \u003cp\u003e21 Deep Reactive Ion Etching.\u003c\/p\u003e \u003cp\u003e22 Wafer Engineering.\u003c\/p\u003e \u003cp\u003e23 Special Processes and Materials.\u003c\/p\u003e \u003cp\u003e24 Serial Microprocessing.\u003c\/p\u003e \u003cp\u003e25 Process Integration.\u003c\/p\u003e \u003cp\u003e26 MOS Transistor Fabrication.\u003c\/p\u003e \u003cp\u003e27 Bipolar Transistors.\u003c\/p\u003e \u003cp\u003e28 Multilevel Metallization.\u003c\/p\u003e \u003cp\u003e29 Surface Micromachining.\u003c\/p\u003e \u003cp\u003e30 MEMS Process Integration.\u003c\/p\u003e \u003cp\u003e31 Process Equipment.\u003c\/p\u003e \u003cp\u003e32 Equipment for Hot Processes.\u003c\/p\u003e \u003cp\u003e33 Vacuum and Plasmas.\u003c\/p\u003e \u003cp\u003e34 CVD and Epitaxy Equipment.\u003c\/p\u003e \u003cp\u003e35 Cleanrooms.\u003c\/p\u003e \u003cp\u003e36 Yield and Reliability.\u003c\/p\u003e \u003cp\u003e37 Economics of Microfabrication.\u003c\/p\u003e \u003cp\u003e38 Moore's Law and Scaling Trends.\u003c\/p\u003e \u003cp\u003e39 Microfabrication at Large.\u003c\/p\u003e \u003cp\u003eAppendix A Properties of Silicon.\u003c\/p\u003e \u003cp\u003eAppendix B Constants and Conversion Factors.\u003c\/p\u003e \u003cp\u003eAppendix C Oxide and Nitride Thickness by Color.\u003c\/p\u003e \u003cp\u003eIndex.\u003c\/p\u003e","brand":"John Wiley \u0026 Sons Inc","offers":[{"title":"Default Title","offer_id":49402426327383,"sku":"9780470749838","price":58.85,"currency_code":"GBP","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0817\/1739\/5799\/files\/9780470749838.jpg?v=1730480365","url":"https:\/\/bookcurl.com\/products\/introduction-to-microfabrication-9780470749838","provider":"Book Curl","version":"1.0","type":"link"}