{"product_id":"introduction-to-metrology-applications-in-ic-manufacturing-9781628418118","title":"Introduction to Metrology Applications in IC","description":"\u003cb\u003eBook Synopsis\u003c\/b\u003e\u003cbr\u003eMetrology has grown significantly, especially in semiconductor manufacturing, and such growth necessitates increased expertise. Until now, this field has never had a book written from the perspective of an engineer in a modern IC manufacturing and development environment. The topics in this \u003cem\u003eTutorial Text\u003c\/em\u003e range from metrology at its most basic level to future predictions and challenges, including measurement methods, industrial applications, fundamentals of traditional measurement system characterization and calibration, semiconductor-specific applications, optical metrology measurement techniques, charged particle measurement techniques, x-ray and in situ metrology, hybrid metrology, and mask making. The accompanying CD includes example spreadsheets of measurement uncertainty analysis—specifically, precision, matching, and relative accuracy.","brand":"SPIE Press","offers":[{"title":"Default Title","offer_id":50099299615063,"sku":"9781628418118","price":59.4,"currency_code":"GBP","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0817\/1739\/5799\/files\/9781628418118.jpg?v=1740995824","url":"https:\/\/bookcurl.com\/products\/introduction-to-metrology-applications-in-ic-manufacturing-9781628418118","provider":"Book Curl","version":"1.0","type":"link"}