{"product_id":"glow-discharge-processes-9780471078289","title":"Glow Discharge Processes","description":"\u003cb\u003eBook Synopsis\u003c\/b\u003e\u003cbr\u003eDevelops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applications--practical techniques diligently related to fundamentals. Subjects range from voltage, distributions encountered in plasma etching systems to plasma-electron interactions that contribute to sustaining the discharge.\u003cbr\u003e\u003cbr\u003e\u003cb\u003eTable of Contents\u003c\/b\u003e\u003cbr\u003eGases.\u003cbr\u003e \u003cbr\u003e Gas Phase Collision Processes.\u003cbr\u003e \u003cbr\u003e Plasmas.\u003cbr\u003e \u003cbr\u003e DC Glow Discharges.\u003cbr\u003e \u003cbr\u003e RF Discharges.\u003cbr\u003e \u003cbr\u003e Sputtering.\u003cbr\u003e \u003cbr\u003e Plasma Etching.\u003cbr\u003e \u003cbr\u003e Appendices.\u003cbr\u003e \u003cbr\u003e Index.","brand":"Wiley","offers":[{"title":"Default Title","offer_id":53515420860759,"sku":"9780471078289","price":197.96,"currency_code":"GBP","in_stock":true}],"url":"https:\/\/bookcurl.com\/products\/glow-discharge-processes-9780471078289","provider":"Book Curl","version":"1.0","type":"link"}