{"product_id":"contamination-and-esd-control-in-hightechnology-manufacturing-wiley-ieee-9780471414520","title":"Contamination and ESD Control in HighTechnology Manufacturing Wiley  IEEE","description":"\u003cb\u003eBook Synopsis\u003c\/b\u003e\u003cbr\u003eContamination and Electrostatic Discharge (ESD) affect yield and reliability in an ever-increasing number of industries. In the past, contamination and ESD were recognized as affecting semiconductors, disk drives, aerospace, pharmaceutical and medical device industries.\u003cbr\u003e\u003cbr\u003e\u003cb\u003eTable of Contents\u003c\/b\u003e\u003cbr\u003e\u003cp\u003ePreface xv\u003c\/p\u003e \u003cp\u003e\u003cb\u003e1 Fundamentals of Contamination Control 1\u003c\/b\u003e\u003c\/p\u003e \u003cp\u003e1.1 Introduction 1\u003c\/p\u003e \u003cp\u003e1.1.1 Contamination Sources 1\u003c\/p\u003e \u003cp\u003e1.1.2 Contamination Adhesion Forces 3\u003c\/p\u003e \u003cp\u003e1.1.3 Contamination Control Methods 9\u003c\/p\u003e \u003cp\u003e1.2 Glossary of Contamination Control Terms 10\u003c\/p\u003e \u003cp\u003e1.3 Specifying Contamination in Air and on Surfaces 13\u003c\/p\u003e \u003cp\u003e1.4 Sources of Contamination 16\u003c\/p\u003e \u003cp\u003e1.5 Contamination Control Requirements 18\u003c\/p\u003e \u003cp\u003e1.5.1 Airborne Particle Requirements 18\u003c\/p\u003e \u003cp\u003e1.5.2 Chemical Vapor Contamination Control Limits 33\u003c\/p\u003e \u003cp\u003e1.5.3 Ionic Contamination Control Limits 35\u003c\/p\u003e \u003cp\u003e1.5.4 Magnetic Contamination Control Limits 37\u003c\/p\u003e \u003cp\u003e1.5.5 Surface Contamination Rates and Air Ionization 37\u003c\/p\u003e \u003cp\u003e1.5.6 Contact Transfer and In Situ Contamination 38\u003c\/p\u003e \u003cp\u003e1.5.7 Airflow Requirements 39\u003c\/p\u003e \u003cp\u003e1.5.8 Pressure Requirements and Enclosure Exhausts 39\u003c\/p\u003e \u003cp\u003e1.5.9 Maintenance Requirements 40\u003c\/p\u003e \u003cp\u003e1.5.10 Other Requirements 43\u003c\/p\u003e \u003cp\u003e1.5.11 Summary of Requirements 43\u003c\/p\u003e \u003cp\u003e1.6 Pertinent Standards 43\u003c\/p\u003e \u003cp\u003eReferences and Notes 46\u003c\/p\u003e \u003cp\u003eAdditional Reading 46\u003c\/p\u003e \u003cp\u003e\u003cb\u003e2 Fundamentals of ESD Control 48\u003c\/b\u003e\u003c\/p\u003e \u003cp\u003e2.1 Introduction and Historical Perspective 48\u003c\/p\u003e \u003cp\u003e2.2 Glossary of Electrostatic Charge Control Terms 52\u003c\/p\u003e \u003cp\u003e2.3 Sources of Electrostatic Charge 56\u003c\/p\u003e \u003cp\u003e2.3.1 Static Electricity 57\u003c\/p\u003e \u003cp\u003e2.3.2 Effects of Electrostatic Charge and Discharge 65\u003c\/p\u003e \u003cp\u003e2.3.3 Failure Modes in High-Technology ESD-SensitivityDevices 67\u003c\/p\u003e \u003cp\u003e2.4 Requirements of ESD Control 68\u003c\/p\u003e \u003cp\u003e2.4.1 Determining ESD Damage Sensitivity 69\u003c\/p\u003e \u003cp\u003e2.4.2 Electrically Explosive Device ESD Modeling 74\u003c\/p\u003e \u003cp\u003e2.5 Building the ESD-Safe Workplace 75\u003c\/p\u003e \u003cp\u003e2.5.1 Surface Resistivity of Materials 75\u003c\/p\u003e \u003cp\u003e2.5.2 Grounding 77\u003c\/p\u003e \u003cp\u003e2.5.3 Identification of and Access to an ESD-Safe Work Area 78\u003c\/p\u003e \u003cp\u003e2.5.4 ESD-Protective Floor Coverings 78\u003c\/p\u003e \u003cp\u003e2.5.5 Work Surfaces and Table Mats 81\u003c\/p\u003e \u003cp\u003e2.5.6 Wrist Strap Ground Points 83\u003c\/p\u003e \u003cp\u003e2.5.7 Air Ionization Systems 83\u003c\/p\u003e \u003cp\u003e2.5.8 Relative Humidity 88\u003c\/p\u003e \u003cp\u003e2.5.9 Chairs and Stools 90\u003c\/p\u003e \u003cp\u003e2.5.10 Trash Cans 90\u003c\/p\u003e \u003cp\u003e2.5.11 Cathode-Ray Tube Displays 91\u003c\/p\u003e \u003cp\u003e2.5.12 Field Potential Limits 93\u003c\/p\u003e \u003cp\u003e2.5.13 Tools and Fixtures 94\u003c\/p\u003e \u003cp\u003e2.5.14 Conveyors 94\u003c\/p\u003e \u003cp\u003e2.6 ESD Controls for People 95\u003c\/p\u003e \u003cp\u003e2.6.1 Wrist Strap and Coiled Cord 95\u003c\/p\u003e \u003cp\u003e2.6.2 Training and Certification Program 95\u003c\/p\u003e \u003cp\u003e2.6.3 Cleanroom Gowns and ESD Lab Coats 97\u003c\/p\u003e \u003cp\u003e2.6.4 Footwear 98\u003c\/p\u003e \u003cp\u003e2.6.5 Gloves, Liners, and Finger Cots 100\u003c\/p\u003e \u003cp\u003e2.7 Consumables and Accessories 100\u003c\/p\u003e \u003cp\u003e2.7.1 Packaging 100\u003c\/p\u003e \u003cp\u003e2.7.2 Desiccants 102\u003c\/p\u003e \u003cp\u003e2.7.3 Tote Boxes, Bins, and Other Shipping Containers 102\u003c\/p\u003e \u003cp\u003e2.7.4 Notebooks and Sheet Protectors 104\u003c\/p\u003e \u003cp\u003e2.7.5 Swabs and Wipers 104\u003c\/p\u003e \u003cp\u003e2.7.6 Paper 104\u003c\/p\u003e \u003cp\u003e2.7.7 Tape 104\u003c\/p\u003e \u003cp\u003e2.8 Personnel Equipment and Procedures for Its Use 105\u003c\/p\u003e \u003cp\u003e2.8.1 Wrist Straps and Wrist Strap Monitors 105\u003c\/p\u003e \u003cp\u003e2.8.2 Sit–Stand Protocol 106\u003c\/p\u003e \u003cp\u003e2.9 Transportation of ESD-Sensitive Products 106\u003c\/p\u003e \u003cp\u003e2.10 Inspections and Record Keeping 106\u003c\/p\u003e \u003cp\u003e2.10.1 Daily Visual Inspection 106\u003c\/p\u003e \u003cp\u003e2.10.2 Periodic Instrumental Inspection 107\u003c\/p\u003e \u003cp\u003e2.10.3 Testing Protocols 109\u003c\/p\u003e \u003cp\u003e2.11 ESD Control Program 112\u003c\/p\u003e \u003cp\u003e2.12 ESD and Contamination Control 115\u003c\/p\u003e \u003cp\u003e2.13 Useful Reference Standards 116\u003c\/p\u003e \u003cp\u003eReferences and Notes 117\u003c\/p\u003e \u003cp\u003e\u003cb\u003e3 Sampling and Analysis Methods 119\u003c\/b\u003e\u003c\/p\u003e \u003cp\u003e3.1 Introduction 119\u003c\/p\u003e \u003cp\u003e3.2 Classification of Analysis Methods 119\u003c\/p\u003e \u003cp\u003e3.2.1 Functional Laboratory Tests 121\u003c\/p\u003e \u003cp\u003e3.2.2 Nonfunctional Tests: Objective Laboratory Tests 124\u003c\/p\u003e \u003cp\u003e3.3 Sampling of Contaminants in Air, in Liquids, and on Surfaces 133\u003c\/p\u003e \u003cp\u003e3.3.1 Contaminants in Air 133\u003c\/p\u003e \u003cp\u003e3.3.2 Contaminants in Liquids 134\u003c\/p\u003e \u003cp\u003e3.3.3 Surface-Borne Contaminants 135\u003c\/p\u003e \u003cp\u003e3.4 Organic Contamination Analysis Methods 136\u003c\/p\u003e \u003cp\u003e3.4.1 Water Break Test 136\u003c\/p\u003e \u003cp\u003e3.4.2 Contact Angle Measurement 136\u003c\/p\u003e \u003cp\u003e3.4.3 Optically Stimulated Electron Emission Technique 137\u003c\/p\u003e \u003cp\u003e3.4.4 Nonvolatile Residue Test 137\u003c\/p\u003e \u003cp\u003e3.4.5 Organic Sampling Techniques 137\u003c\/p\u003e \u003cp\u003e3.4.6 Central Atmospheric Monitoring System 138\u003c\/p\u003e \u003cp\u003e3.4.7 Electron Spectroscopy for Chemical Analysis 139\u003c\/p\u003e \u003cp\u003e3.4.8 Gas Chromatography\/Mass Spectroscopy 139\u003c\/p\u003e \u003cp\u003e3.4.9 Secondary Ion Mass Spectroscopy 139\u003c\/p\u003e \u003cp\u003e3.5 Ionic and Inorganic Contamination Analysis Methods 139\u003c\/p\u003e \u003cp\u003e3.6 Electrostatic Discharge Methods 141\u003c\/p\u003e \u003cp\u003e3.6.1 Tribocharge Testing 141\u003c\/p\u003e \u003cp\u003e3.6.2 Bulk and Surface Resistance Measurements 142\u003c\/p\u003e \u003cp\u003e3.6.3 Air Ionizer Testing 144\u003c\/p\u003e \u003cp\u003e3.6.4 Typical ESD Field Instruments 145\u003c\/p\u003e \u003cp\u003e3.7 Numerical Simulation 146\u003c\/p\u003e \u003cp\u003e3.8 Algebraic Predictive Modeling 147\u003c\/p\u003e \u003cp\u003e3.9 Statistical Analysis Methods 150\u003c\/p\u003e \u003cp\u003e3.9.1 Basic Statistical Analysis Tools 150\u003c\/p\u003e \u003cp\u003e3.9.2 Gage Capability Analysis of Cleanliness Measurement Methods 151\u003c\/p\u003e \u003cp\u003eAdditional Reading 156\u003c\/p\u003e \u003cp\u003eReferences and Notes 156\u003c\/p\u003e \u003cp\u003e\u003cb\u003e4 Facilities Design: Contamination- and ESD-safe Work Areas 158\u003c\/b\u003e\u003c\/p\u003e \u003cp\u003e4.1 Introduction 158\u003c\/p\u003e \u003cp\u003e4.2 Basics of Cleanroom Design 159\u003c\/p\u003e \u003cp\u003e4.2.1 What Can Be Called a Cleanroom 159\u003c\/p\u003e \u003cp\u003e4.2.2 What It Takes to Make a Cleanroom Work 161\u003c\/p\u003e \u003cp\u003e4.2.3 How Filters Work 162\u003c\/p\u003e \u003cp\u003e4.3 Cleanrooms 165\u003c\/p\u003e \u003cp\u003e4.3.1 Non-Unidirectional-Flow (Conventional or Mixed-Flow) Cleanrooms 166\u003c\/p\u003e \u003cp\u003e4.3.2 Air Ionization for Non-Unidirectional-Flow Cleanrooms 168\u003c\/p\u003e \u003cp\u003e4.3.3 Unidirectional Flow: 100% Filter Coverage 169\u003c\/p\u003e \u003cp\u003e4.3.4 Air Ionization in Unidirectional-Flow Cleanrooms 174\u003c\/p\u003e \u003cp\u003e4.3.5 Adding a Perforated Raised Floor 174\u003c\/p\u003e \u003cp\u003e4.3.6 Balancing a Room Using a Perforated Raised Floor 175\u003c\/p\u003e \u003cp\u003e4.3.7 Airflow Balancing After Tool Installation 176\u003c\/p\u003e \u003cp\u003e4.3.8 Solid vs. Perforated Work Surfaces 181\u003c\/p\u003e \u003cp\u003e4.3.9 Parts Storage Locations 181\u003c\/p\u003e \u003cp\u003e4.3.10 Horizontal Unidirectional-Airflow Cleanrooms 182\u003c\/p\u003e \u003cp\u003e4.4 Cleanroom Construction and Operating Costs 183\u003c\/p\u003e \u003cp\u003e4.5 Modern Energy-Saving Approaches 184\u003c\/p\u003e \u003cp\u003e4.5.1 Unidirectional-Flow Clean Benches 184\u003c\/p\u003e \u003cp\u003e4.5.2 Isolators and Minienvironments 186\u003c\/p\u003e \u003cp\u003e4.5.3 Point-of-Use Clean Air Cleanrooms 187\u003c\/p\u003e \u003cp\u003e4.5.4 Tunnelizing an Existing Ballroom Cleanroom 188\u003c\/p\u003e \u003cp\u003e4.5.5 Minienvironments 190\u003c\/p\u003e \u003cp\u003e4.6 Other Design Considerations 191\u003c\/p\u003e \u003cp\u003e4.6.1 Doors and Air Showers 191\u003c\/p\u003e \u003cp\u003e4.6.2 Pass-Throughs 192\u003c\/p\u003e \u003cp\u003e4.6.3 Equipment Pass-Throughs 193\u003c\/p\u003e \u003cp\u003e4.6.4 Service Areas 193\u003c\/p\u003e \u003cp\u003eReferences and Notes 193\u003c\/p\u003e \u003cp\u003e\u003cb\u003e5 Getting Clean Parts and Getting Parts Clean 195\u003c\/b\u003e\u003c\/p\u003e \u003cp\u003e5.1 Introduction 195\u003c\/p\u003e \u003cp\u003e5.2 Historical Perspective 196\u003c\/p\u003e \u003cp\u003e5.3 Gross and Precision Cleanliness Protocols 197\u003c\/p\u003e \u003cp\u003e5.3.1 Approaches to Specifying Cleanliness Levels 199\u003c\/p\u003e \u003cp\u003e5.4 Design for Manufacturability and Cleanability 202\u003c\/p\u003e \u003cp\u003e5.4.1 Design-for-Manufacturability Guidelines 202\u003c\/p\u003e \u003cp\u003e5.4.2 Design-for-Cleanability Guidelines 203\u003c\/p\u003e \u003cp\u003e5.4.3 Cleanability Indexes for Indirect Cleanliness Measurements 203\u003c\/p\u003e \u003cp\u003e5.4.4 Design-for-Cleanability Planning Considerations 206\u003c\/p\u003e \u003cp\u003e5.4.5 Design-for-Cleanability Management Considerations 216\u003c\/p\u003e \u003cp\u003e5.5 Process Design Guidelines 216\u003c\/p\u003e \u003cp\u003e5.5.1 Use of Water-Soluble Cutting Fluids 217\u003c\/p\u003e \u003cp\u003e5.5.2 Minimizing Work in Progress by Implementing Continuous-Flow Manufacturing 218\u003c\/p\u003e \u003cp\u003e5.5.3 Rinsing After Machining 218\u003c\/p\u003e \u003cp\u003e5.5.4 Parts Handling After Final Cleaning 218\u003c\/p\u003e \u003cp\u003e5.5.5 Soldering and Flux Removal 219\u003c\/p\u003e \u003cp\u003e5.5.6 Clean–Then Assemble vs. Assemble–Then Clean 219\u003c\/p\u003e \u003cp\u003e5.6 Cleaning Processes 220\u003c\/p\u003e \u003cp\u003e5.6.1 Particles in Liquid Baths 221\u003c\/p\u003e \u003cp\u003e5.6.2 Boundary Layers 221\u003c\/p\u003e \u003cp\u003e5.6.3 Ultrasonic Cleaning 221\u003c\/p\u003e \u003cp\u003e5.6.4 Spray Cleaning 225\u003c\/p\u003e \u003cp\u003e5.6.5 Spin-Rinse Dryer Cleaning 228\u003c\/p\u003e \u003cp\u003e5.6.6 Vapor Degreasing 230\u003c\/p\u003e \u003cp\u003e5.6.7 Chemical Cleaning 230\u003c\/p\u003e \u003cp\u003e5.6.8 Solvent Cleaning 230\u003c\/p\u003e \u003cp\u003e5.6.9 Mechanical Agitation Cleaning 231\u003c\/p\u003e \u003cp\u003e5.6.10 Manual Cleaning 231\u003c\/p\u003e \u003cp\u003e5.6.11 Specialty Cleaning 232\u003c\/p\u003e \u003cp\u003e5.7 Drying Processes 234\u003c\/p\u003e \u003cp\u003e5.7.1 Spin-Rinse Drying 234\u003c\/p\u003e \u003cp\u003e5.7.2 Forced-Air Drying 234\u003c\/p\u003e \u003cp\u003e5.7.3 Vacuum Drying 235\u003c\/p\u003e \u003cp\u003e5.7.4 Adsorption Drying 235\u003c\/p\u003e \u003cp\u003e5.7.5 Chemical Drying 235\u003c\/p\u003e \u003cp\u003e5.8 Cost of Cleaning 236\u003c\/p\u003e \u003cp\u003e5.9 Vendor Process Contamination Checklist 236\u003c\/p\u003e \u003cp\u003e5.10 Case Studies: Cleaning Equipment and Cleaning Process Design 246\u003c\/p\u003e \u003cp\u003e5.11 Details on the Clean–Then Assemble and Assemble–Then Clean Procedures 252\u003c\/p\u003e \u003cp\u003e5.11.1 Cleaning Strategies 253\u003c\/p\u003e \u003cp\u003e5.11.2 Case Studies: CTA and ATC 255\u003c\/p\u003e \u003cp\u003e5.11.3 Case Study Results and Discussion 262\u003c\/p\u003e \u003cp\u003e5.12 Particle Size Distributions 264\u003c\/p\u003e \u003cp\u003e5.12.1 MIL-STD- 1246 264\u003c\/p\u003e \u003cp\u003e5.12.2 Analytical Methods 265\u003c\/p\u003e \u003cp\u003e5.12.3 Extraction Methods Tested 266\u003c\/p\u003e \u003cp\u003e5.12.4 Results 266\u003c\/p\u003e \u003cp\u003e5.13 Tool Part Cleanliness 272\u003c\/p\u003e \u003cp\u003eReferences and Notes 273\u003c\/p\u003e \u003cp\u003e\u003cb\u003e6 Tooling Design and Certification 276\u003c\/b\u003e\u003c\/p\u003e \u003cp\u003e6.1 Introduction 276\u003c\/p\u003e \u003cp\u003e6.1.1 Tooling Design Process 277\u003c\/p\u003e \u003cp\u003e6.1.2 Applications and Limitations of Tooling Design 278\u003c\/p\u003e \u003cp\u003e6.2 Contamination and ESD Control Requirements 279\u003c\/p\u003e \u003cp\u003e6.3 Maintenance Requirements 280\u003c\/p\u003e \u003cp\u003e6.3.1 (Basics of a) Wipe-Down Procedure 280\u003c\/p\u003e \u003cp\u003e6.3.2 Maintenance Wipe-Down 281\u003c\/p\u003e \u003cp\u003e6.3.3 Engineering Changes 282\u003c\/p\u003e \u003cp\u003e6.3.4 Summary of Requirements 282\u003c\/p\u003e \u003cp\u003e6.4 General Design Alternatives 283\u003c\/p\u003e \u003cp\u003e6.4.1 Eliminating Contamination Generators 283\u003c\/p\u003e \u003cp\u003e6.4.2 Relocating Contamination Generators 284\u003c\/p\u003e \u003cp\u003e6.4.3 Enclosing and Evacuating Contamination Generators 285\u003c\/p\u003e \u003cp\u003e6.5 Materials 293\u003c\/p\u003e \u003cp\u003e6.5.1 Guidelines for Materials 293\u003c\/p\u003e \u003cp\u003e6.5.2 Guidelines for Wear 297\u003c\/p\u003e \u003cp\u003e6.5.3 Guidelines for Plastics 301\u003c\/p\u003e \u003cp\u003e6.6 Surface Treatments 308\u003c\/p\u003e \u003cp\u003e6.6.1 Paints 309\u003c\/p\u003e \u003cp\u003e6.6.2 Anodizing and Related Treatments 310\u003c\/p\u003e \u003cp\u003e6.6.3 Electroplating, Electropolishing, and Other Treatments 311\u003c\/p\u003e \u003cp\u003e6.6.4 Cautions About Coatings 311\u003c\/p\u003e \u003cp\u003e6.6.5 Synergistic Coatings 311\u003c\/p\u003e \u003cp\u003e6.6.6 Relative Wear Properties of Coatings 312\u003c\/p\u003e \u003cp\u003e6.6.7 Surface Texture and Porosity 312\u003c\/p\u003e \u003cp\u003e6.7 Selection and Evaluation of Components 313\u003c\/p\u003e \u003cp\u003e6.7.1 Pneumatic Devices 314\u003c\/p\u003e \u003cp\u003e6.7.2 Linear Motion Guides 314\u003c\/p\u003e \u003cp\u003e6.7.3 Electric Motors 314\u003c\/p\u003e \u003cp\u003e6.7.4 Process Piping and Point-of-Use Filtration 315\u003c\/p\u003e \u003cp\u003e6.7.5 In Situ Monitoring Equipment 316\u003c\/p\u003e \u003cp\u003e6.7.6 Hand Tools 317\u003c\/p\u003e \u003cp\u003e6.8 Tool and Workstation Layout 318\u003c\/p\u003e \u003cp\u003e6.8.1 Flow Control Enclosures, Minienvironments, and the Standard Machine Interface 318\u003c\/p\u003e \u003cp\u003e6.8.2 Putting the Cleanroom Tool Together 322\u003c\/p\u003e \u003cp\u003e6.9 Cleanroom Certification of Automated Tooling 325\u003c\/p\u003e \u003cp\u003e6.9.1 Statistical Requirements for Sampling 327\u003c\/p\u003e \u003cp\u003e6.9.2 Analytical Equipment and Methods 331\u003c\/p\u003e \u003cp\u003eReferences and Notes 334\u003c\/p\u003e \u003cp\u003eAdditional Reading 334\u003c\/p\u003e \u003cp\u003e\u003cb\u003e7 Continuous Monitoring 336\u003c\/b\u003e\u003c\/p\u003e \u003cp\u003e7.1 Introduction 336\u003c\/p\u003e \u003cp\u003e7.1.1 Approaches to Monitoring 337\u003c\/p\u003e \u003cp\u003e7.1.2 Traditional Airborne Particle Measurements 338\u003c\/p\u003e \u003cp\u003e7.1.3 Critical and Busy Sampling 339\u003c\/p\u003e \u003cp\u003e7.1.4 Modified Data Collection Protocol 339\u003c\/p\u003e \u003cp\u003e7.1.5 Ongoing Use of Critical and Busy Sampling 340\u003c\/p\u003e \u003cp\u003e7.1.6 Case Studies: Traditional vs. Critical and Busy Sampling 341\u003c\/p\u003e \u003cp\u003e7.1.7 Trend, Cyclic, and Burst Patterns of Particle Generation 346\u003c\/p\u003e \u003cp\u003e7.1.8 Case Studies: Other Applications of Continuous Monitoring 348\u003c\/p\u003e \u003cp\u003e7.1.9 Summary and Conclusions 350\u003c\/p\u003e \u003cp\u003e7.2 Continuous Contamination Monitoring 350\u003c\/p\u003e \u003cp\u003e7.2.1 Electronically Multiplexed Monitoring 350\u003c\/p\u003e \u003cp\u003e7.2.2 Pneumatically Multiplexed Particle Monitoring 351\u003c\/p\u003e \u003cp\u003e7.3 Continuous Monitoring of Manufacturing 352\u003c\/p\u003e \u003cp\u003e7.3.1 Air Quality 352\u003c\/p\u003e \u003cp\u003e7.3.2 Process Fluid Purity 355\u003c\/p\u003e \u003cp\u003e7.3.3 The Value of 100% Sampling 356\u003c\/p\u003e \u003cp\u003e7.3.4 Cleanliness of Surfaces and Electrostatic Charge 358\u003c\/p\u003e \u003cp\u003e7.4 Evaluation of In Situ Monitoring in an Aqueous Cleaning Application 359\u003c\/p\u003e \u003cp\u003e7.4.1 Description of Experiment 360\u003c\/p\u003e \u003cp\u003e7.4.2 Experimental Results 362\u003c\/p\u003e \u003cp\u003e7.4.3 Management Using ISPM 370\u003c\/p\u003e \u003cp\u003e7.4.4 Conclusions 371\u003c\/p\u003e \u003cp\u003e7.5 Antennas for Electrostatic Charge Monitoring 372\u003c\/p\u003e \u003cp\u003eReferences and Notes 372\u003c\/p\u003e \u003cp\u003e\u003cb\u003e8 Consumable Supplies and Packaging Materials 374\u003c\/b\u003e\u003c\/p\u003e \u003cp\u003e8.1 Introduction 374\u003c\/p\u003e \u003cp\u003e8.2 Cleanroom and ESD Gloves 375\u003c\/p\u003e \u003cp\u003e8.3 Functional vs. Nonfunctional Testing 376\u003c\/p\u003e \u003cp\u003e8.3.1 Functional Materials Qualification Tests 376\u003c\/p\u003e \u003cp\u003e8.3.2 Nonfunctional Testing: Objective Laboratory Measurements 377\u003c\/p\u003e \u003cp\u003e8.3.3 ESD Considerations in Glove Selection 379\u003c\/p\u003e \u003cp\u003e8.4 Glove Use Strategies 381\u003c\/p\u003e \u003cp\u003e8.5 Initial Qualification vs. the Need for Ongoing Lot Certification 381\u003c\/p\u003e \u003cp\u003e8.6 Glove Washing 383\u003c\/p\u003e \u003cp\u003e8.6.1 Early Observations with Natural Rubber Latex Gloves 383\u003c\/p\u003e \u003cp\u003e8.6.2 Gloves Washability 384\u003c\/p\u003e \u003cp\u003e8.6.3 Nitrile Glove Performance 387\u003c\/p\u003e \u003cp\u003e8.6.4 Glove Washing Conclusions 388\u003c\/p\u003e \u003cp\u003e8.7 ESD Performance of Gloves 388\u003c\/p\u003e \u003cp\u003e8.7.1 Materials Selection for ESD Properties 389\u003c\/p\u003e \u003cp\u003e8.7.2 Specifying the ESD Performance of Cleanroom Gloves and Glove Liners 389\u003c\/p\u003e \u003cp\u003e8.7.3 Testing Considerations 391\u003c\/p\u003e \u003cp\u003e8.7.4 Factors That Affect the ESD Performance of Gloves 392\u003c\/p\u003e \u003cp\u003e8.8 Glove Laundering 396\u003c\/p\u003e \u003cp\u003e8.8.1 Cost–Benefit Problem 397\u003c\/p\u003e \u003cp\u003e8.8.2 Polyurethane Glove Laboratory Properties 397\u003c\/p\u003e \u003cp\u003e8.8.3 ESD Performance 398\u003c\/p\u003e \u003cp\u003e8.8.4 Chemical Contamination 399\u003c\/p\u003e \u003cp\u003e8.8.5 Wear Characteristics 399\u003c\/p\u003e \u003cp\u003e8.8.6 Laundering Tests 401\u003c\/p\u003e \u003cp\u003e8.8.7 Impact of Laundering and Reuse on Glove Cost 401\u003c\/p\u003e \u003cp\u003e8.8.8 Conclusions 402\u003c\/p\u003e \u003cp\u003e8.9 Wipers and Swabs 402\u003c\/p\u003e \u003cp\u003e8.9.1 Selecting the Correct Wiper or Swab 403\u003c\/p\u003e \u003cp\u003e8.10 Reusable and Disposable Packaging Materials 405\u003c\/p\u003e \u003cp\u003e8.10.1 ESD Consideration in Packaging 405\u003c\/p\u003e \u003cp\u003e8.10.2 Carbon-Filled Polymers 405\u003c\/p\u003e \u003cp\u003e8.10.3 Metal Loading 406\u003c\/p\u003e \u003cp\u003e8.10.4 Topical and Incorporated Organic Agents 406\u003c\/p\u003e \u003cp\u003e8.10.5 Copolymer Blends 407\u003c\/p\u003e \u003cp\u003e8.11 Facial Coverings 407\u003c\/p\u003e \u003cp\u003eReferences and Notes 408\u003c\/p\u003e \u003cp\u003e\u003cb\u003e9 Controlling Contamination and ESD From People 410\u003c\/b\u003e\u003c\/p\u003e \u003cp\u003e9.1 Introduction 410\u003c\/p\u003e \u003cp\u003e9.2 People as a Source of Contamination 410\u003c\/p\u003e \u003cp\u003e9.2.1 Skin and Hair 411\u003c\/p\u003e \u003cp\u003e9.2.2 Fingerprints 413\u003c\/p\u003e \u003cp\u003e9.2.3 Bacteria and Fungi 414\u003c\/p\u003e \u003cp\u003e9.2.4 Spittle Droplets 414\u003c\/p\u003e \u003cp\u003e9.2.5 Street Clothing 415\u003c\/p\u003e \u003cp\u003e9.2.6 Other Forms of Contamination 416\u003c\/p\u003e \u003cp\u003e9.3 Typical Gowning Protocols 417\u003c\/p\u003e \u003cp\u003e9.3.1 Inner Suit 418\u003c\/p\u003e \u003cp\u003e9.3.2 Hair Cover (Bouffant) 419\u003c\/p\u003e \u003cp\u003e9.3.3 Woven Gloves 419\u003c\/p\u003e \u003cp\u003e9.3.4 Barrier Gloves 420\u003c\/p\u003e \u003cp\u003e9.3.5 Facial Cover 420\u003c\/p\u003e \u003cp\u003e9.3.6 Hood and Powered Headgear 421\u003c\/p\u003e \u003cp\u003e9.3.7 Frock, Coverall, and Two-Piece Suit 422\u003c\/p\u003e \u003cp\u003e9.3.8 Shoe Covers, Booties, and Special Shoes 424\u003c\/p\u003e \u003cp\u003e9.3.9 Suggested Frequency of Change 426\u003c\/p\u003e \u003cp\u003e9.4 Procedures for Entering a Cleanroom 426\u003c\/p\u003e \u003cp\u003e9.4.1 Pre-Change Room Procedure 427\u003c\/p\u003e \u003cp\u003e9.4.2 Wipe-Down 427\u003c\/p\u003e \u003cp\u003e9.4.3 Hairnet and Face Mask 428\u003c\/p\u003e \u003cp\u003e9.4.4 Shoe Cleaners 429\u003c\/p\u003e \u003cp\u003e9.4.5 Handwashing 430\u003c\/p\u003e \u003cp\u003e9.4.6 Changing into Cleanroom Garments 431\u003c\/p\u003e \u003cp\u003e9.4.7 Powered Headgear 433\u003c\/p\u003e \u003cp\u003e9.4.8 Footwear 433\u003c\/p\u003e \u003cp\u003e9.4.9 Shoe Cleaners and Tacky Mats 436\u003c\/p\u003e \u003cp\u003e9.5 Behavior in a Cleanroom 437\u003c\/p\u003e \u003cp\u003e9.5.1 Working in a Cleanroom 438\u003c\/p\u003e \u003cp\u003e9.5.2 HEPA Filters 439\u003c\/p\u003e \u003cp\u003e9.5.3 Raised Floors 439\u003c\/p\u003e \u003cp\u003e9.5.4 Glove Awareness 439\u003c\/p\u003e \u003cp\u003e9.6 Procedures for Exiting a Cleanroom 439\u003c\/p\u003e \u003cp\u003e9.6.1 Knee-High Booties 440\u003c\/p\u003e \u003cp\u003e9.6.2 Frock or Jumpsuit 440\u003c\/p\u003e \u003cp\u003e9.6.3 Head Covering 440\u003c\/p\u003e \u003cp\u003e9.6.4 Hairnets, Gloves, and Disposable Shoe Covers 441\u003c\/p\u003e \u003cp\u003e9.7 Relationship between Attire and Class Achieved 441\u003c\/p\u003e \u003cp\u003e9.8 Procedures for Entering an ESD-Safe Work Area 443\u003c\/p\u003e \u003cp\u003e9.8.1 Behavior in an ESD-Safe Work Area 444\u003c\/p\u003e \u003cp\u003e9.8.2 ESD-Safe Work Area in a Cleanroom 445\u003c\/p\u003e \u003cp\u003e9.9 Garments and Laundry Services 446\u003c\/p\u003e \u003cp\u003e9.9.1 Garment Options 446\u003c\/p\u003e \u003cp\u003e9.9.2 Measurements of Garment Cleanliness 446\u003c\/p\u003e \u003cp\u003e9.9.3 Selection of Fabrics 448\u003c\/p\u003e \u003cp\u003e9.9.4 Design and Construction of Garments 448\u003c\/p\u003e \u003cp\u003e9.9.5 Selection of a Cleanroom Laundry Service 449\u003c\/p\u003e \u003cp\u003eReferences and Notes 449\u003c\/p\u003e \u003cp\u003e\u003cb\u003e10 Layout of Change Rooms 451\u003c\/b\u003e\u003c\/p\u003e \u003cp\u003e10.1 Principles of Efficient Change Room Design 451\u003c\/p\u003e \u003cp\u003e10.2 Case Studies: Change Rooms 454\u003c\/p\u003e \u003cp\u003e10.3 Entering the Cleanroom 467\u003c\/p\u003e \u003cp\u003e10.3.1 Planning a Trip into the Cleanroom 468\u003c\/p\u003e \u003cp\u003e10.3.2 Pregowning Actions 469\u003c\/p\u003e \u003cp\u003e10.3.3 Dressing in Cleanroom Garments 469\u003c\/p\u003e \u003cp\u003e10.3.4 Finishing Dressing 469\u003c\/p\u003e \u003cp\u003e10.4 Exiting the Cleanroom 470\u003c\/p\u003e \u003cp\u003e10.5 Other Considerations 472\u003c\/p\u003e \u003cp\u003eReferences and Notes 474\u003c\/p\u003e \u003cp\u003e\u003cb\u003e11 Procedures and Documentation 475\u003c\/b\u003e\u003c\/p\u003e \u003cp\u003e11.1 Hierarchy of Documents and Audits 475\u003c\/p\u003e \u003cp\u003e11.2 Operator Self-Check 476\u003c\/p\u003e \u003cp\u003e11.3 Noninstrument Audits 478\u003c\/p\u003e \u003cp\u003e11.4 Instrument Audits 479\u003c\/p\u003e \u003cp\u003e11.5 Independent Audits 480\u003c\/p\u003e \u003cp\u003e11.6 Managing Use of the Audit Scorecard 481\u003c\/p\u003e \u003cp\u003e11.7 Typical Survey 483\u003c\/p\u003e \u003cp\u003e11.8 Case Study: Broken Magnet Procedure 488\u003c\/p\u003e \u003cp\u003e11.8.1 Definition of a Broken Magnet 489\u003c\/p\u003e \u003cp\u003e11.8.2 Recommendations for the Broken Magnet Procedure 489\u003c\/p\u003e \u003cp\u003eReference 491\u003c\/p\u003e \u003cp\u003eIndex 493 \u003c\/p\u003e","brand":"Wiley","offers":[{"title":"Default Title","offer_id":53515427053911,"sku":"9780471414520","price":193.46,"currency_code":"GBP","in_stock":true}],"url":"https:\/\/bookcurl.com\/products\/contamination-and-esd-control-in-hightechnology-manufacturing-wiley-ieee-9780471414520","provider":"Book Curl","version":"1.0","type":"link"}