{"product_id":"chemistry-and-lithography-9780819475626","title":"Chemistry and Lithography","description":"\u003cb\u003eBook Synopsis\u003c\/b\u003e\u003cbr\u003eProvides a treatment of the chemical phenomena in lithography. This book presents topics on the optical and charged particle physics practiced in lithography, with a view of how the marriage between chemistry and optics has made possible the print and electronic revolutions of the digital age.\u003cbr\u003e\u003cbr\u003e\u003cb\u003eTable of Contents\u003c\/b\u003e\u003cbr\u003eIntroduction; Invention of Lithography and Photolithography; Chemical and Optical Origins of Lithography; Evolution of Lithography; Lithographic Chemicals and Materials; Negative Resists; Positive Resists; General Considerations on the Radiation and Photochemistry of Resists; Anti-Reflection Coatings; Stone, Plate and Offset Lithography; The Semiconductor Lithographic Process; Lithographic Modeling; Optical Lithography; Charged Particle Lithography; Implementation of Lithography in Integrated Circuit Device Fabrication; Advanced Lithographic Processing.","brand":"John Wiley \u0026 Sons","offers":[{"title":"Default Title","offer_id":52090748961111,"sku":"9780819475626","price":90.9,"currency_code":"GBP","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0817\/1739\/5799\/files\/9780819475626.jpg?v=1762273315","url":"https:\/\/bookcurl.com\/products\/chemistry-and-lithography-9780819475626","provider":"Book Curl","version":"1.0","type":"link"}